Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 054522/0583 | |
| Pages: | 5 |
| | Recorded: | 12/02/2020 | | |
| Attorney Dkt #: | 35470-47209/US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/10/2023
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Application #:
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17022777
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Filing Dt:
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09/16/2020
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Publication #:
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Pub Dt:
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03/18/2021
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Title:
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Etching Method And Substrate Processing System
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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DOHYUN AHN
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801 CALIFORNIA STREET
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FENWICK & WEST LLP
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MOUNTAIN VIEW, CA 94041
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05/08/2024 02:50 PM
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