Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 054668/0535 | |
| Pages: | 5 |
| | Recorded: | 12/16/2020 | | |
| Attorney Dkt #: | 44014814US02 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/21/2023
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Application #:
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16976569
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Filing Dt:
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08/28/2020
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Publication #:
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Pub Dt:
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02/18/2021
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Title:
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Microwave Plasma Source For Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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SERVILLA WHITNEY LLC
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33 WOOD AVENUE SOUTH
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SUITE 830
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ISELIN, NJ 08830
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05/03/2024 12:37 AM
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