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Reel/Frame:054825/0282   Pages: 5
Recorded: 01/06/2021
Attorney Dkt #:38474U
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
08/01/2023
Application #:
17141830
Filing Dt:
01/05/2021
Publication #:
Pub Dt:
07/08/2021
Title:
SUBSTRATE MISALIGNMENT DETECTION METHOD, SUBSTRATE POSITION ABNORMALITY DETERMINATION METHOD, SUBSTRATE TRANSFER CONTROL METHOD, AND SUBSTRATE MISALIGNMENT DETECTION DEVICE
Assignors
1
Exec Dt:
12/22/2020
2
Exec Dt:
12/14/2020
Assignee
1
3-1 AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondence name and address
NATH, GOLDBERG & MEYER
112 S WEST STREET
38474U_JLM_HJ
ALEXANDRIA, VA 22314

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