Patent Assignment Details
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| Reel/Frame: | 054922/0979 | |
| Pages: | 8 |
| | Recorded: | 01/14/2021 | | |
| Attorney Dkt #: | 190611US02 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17149067
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Filing Dt:
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01/14/2021
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Publication #:
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Pub Dt:
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07/29/2021
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Title:
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HIGH-THROUGHPUT DRY ETCHING OF SILICON OXIDE AND SILICON NITRIDE MATERIALS BY IN-SITU AUTOCATALYST FORMATION
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Assignee
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2400 GROVE BLVD.
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AUSTIN, TX 78741
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04/28/2024 05:57 PM
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