Patent Assignment Details
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| Reel/Frame: | 055051/0058 | |
| Pages: | 45 |
| | Recorded: | 01/20/2021 | | |
| Attorney Dkt #: | HITACHI13-0003041US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/19/2023
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Application #:
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17132608
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Filing Dt:
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12/23/2020
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Publication #:
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Pub Dt:
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07/01/2021
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Title:
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METHODS OF PROCESSING SUBSTRATE AND MANUFACTURING SEMICONDUCTOR DEVICE BY FORMING FILM, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignee
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| 3-4, KANDAKAJI-CHO, CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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Correspondence name and address
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VOLPE KOENIG
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30 SOUTH 17TH STREET-18TH FLOOR
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PHILADELPHIA, PA 19103
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