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Reel/Frame:055218/0452   Pages: 3
Recorded: 02/10/2021
Attorney Dkt #:4030-0804
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/25/2021
Application #:
16719344
Filing Dt:
12/18/2019
Publication #:
Pub Dt:
06/25/2020
Title:
PLASMA PROCESSING APPARATUS, IMPEDANCE MATCHING METHOD, AND PLASMA PROCESSING METHOD
Assignors
1
Exec Dt:
12/17/2019
2
Exec Dt:
12/17/2019
3
Exec Dt:
12/17/2019
Assignee
1
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
ROTHEWELL, FIGG, ERNST & MANBECK, P.C.
607 14TH STREET, NW
SUITE 800
WASHINGTON, DC 20005

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