Patent Assignment Details
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Reel/Frame: | 055386/0913 | |
| Pages: | 14 |
| | Recorded: | 02/24/2021 | | |
Attorney Dkt #: | 1022.0127C |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17175274
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Filing Dt:
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02/12/2021
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Publication #:
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Pub Dt:
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06/03/2021
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Title:
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Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
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Assignee
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3-4, KANDAKAJI-CHO |
CHIYODA-KU |
TOKYO, JAPAN 1010045 |
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Correspondence name and address
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EDELL SHAPIRO & FINNAN LLC
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9801 WASHINGTONIAN BLVD.
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SUITE 750
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GAITHERSBURG, MD 20878
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04/29/2024 04:53 AM
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