Patent Assignment Details
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Reel/Frame: | 055766/0145 | |
| Pages: | 4 |
| | Recorded: | 03/30/2021 | | |
Attorney Dkt #: | LAM1P588D1/4374-3US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/16/2023
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Application #:
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17204758
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Filing Dt:
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03/17/2021
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Publication #:
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Pub Dt:
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07/01/2021
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Title:
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METHOD OF IMPROVING DEPOSITION INDUCED CD IMBALANCE USING SPATIALLY SELECTIVE ASHING OF CARBON BASED FILM
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BEYER LAW GROUP LLP
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P.O. BOX 51887
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PALO ALTO, CA 94303
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05/21/2024 10:19 AM
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