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Reel/Frame:055841/0176   Pages: 5
Recorded: 04/06/2021
Attorney Dkt #:1022.0132C
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
17205822
Filing Dt:
03/18/2021
Publication #:
Pub Dt:
09/23/2021
Title:
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
Assignors
1
Exec Dt:
02/12/2021
2
Exec Dt:
02/08/2021
Assignee
1
3-4, KANDAKAJI-CHO
CHIYODA-KU
TOKYO, JAPAN 1010045
Correspondence name and address
EDELL SHAPIRO & FINNAN LLC
9801 WASHINGTONIAN BLVD.
SUITE 750
GAITHERSBURG, MD 20878

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