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Reel/Frame:056114/0920   Pages: 6
Recorded: 05/03/2021
Attorney Dkt #:37158UY
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/24/2022
Application #:
17245220
Filing Dt:
04/30/2021
Publication #:
Pub Dt:
08/12/2021
Title:
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD
Assignors
1
Exec Dt:
01/06/2020
2
Exec Dt:
01/06/2020
3
Exec Dt:
01/06/2020
4
Exec Dt:
01/07/2020
Assignee
1
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME , MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
NATH, GOLDBERG & MEYER
112 S WEST STREET
37158UY_JLM_HJ
ALEXANDRIA, VA 22314

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