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Reel/Frame:056151/0113   Pages: 3
Recorded: 05/05/2021
Attorney Dkt #:80042-44019165US1-1236232
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/21/2023
Application #:
17208441
Filing Dt:
03/22/2021
Publication #:
Pub Dt:
09/22/2022
Title:
CAPACITIVE METHOD OF DETECTING WAFER CHUCKING AND DE-CHUCKING
Assignors
1
Exec Dt:
04/04/2021
2
Exec Dt:
04/01/2021
3
Exec Dt:
04/19/2021
4
Exec Dt:
04/07/2021
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
KILPATRICK TOWNSEND & STOCKTON LLP
1100 PEACHTREE STREET, SUITE 2800
ATLANTA, GA 30309

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