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Patent Assignment Details
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Reel/Frame:056217/0533   Pages: 2
Recorded: 05/12/2021
Attorney Dkt #:009500-TE0139
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/12/2023
Application #:
17318446
Filing Dt:
05/12/2021
Publication #:
Pub Dt:
11/25/2021
Title:
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Assignor
1
Exec Dt:
05/10/2021
Assignee
1
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
STUDEBAKER & BRACKETT PC
8255 GREENSBORO DRIVE
SUITE 300
TYSONS, VA 22102

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