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Reel/Frame:056459/0799   Pages: 9
Recorded: 06/07/2021
Attorney Dkt #:#E000166 US CON
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/11/2023
Application #:
17341138
Filing Dt:
06/07/2021
Publication #:
Pub Dt:
09/23/2021
Title:
SILICON NITRIDE ETCHING COMPOSITION AND METHOD
Assignors
1
Exec Dt:
04/01/2019
2
Exec Dt:
04/01/2019
3
Exec Dt:
03/25/2019
4
Exec Dt:
03/25/2019
5
Exec Dt:
04/01/2019
Assignee
1
129 CONCORD ROAD
BILLERICA, MASSACHUSETTS 01821
Correspondence name and address
ENTEGRIS, INC./OC
129 CONCORD ROAD, BUILDING 2
BILLERICA, MA 01821

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