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Reel/Frame:057033/0707   Pages: 7
Recorded: 07/30/2021
Attorney Dkt #:HITACHI13-0001173US03
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/27/2022
Application #:
17219592
Filing Dt:
03/31/2021
Publication #:
Pub Dt:
07/15/2021
Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Assignors
1
Exec Dt:
12/03/2018
2
Exec Dt:
12/03/2018
3
Exec Dt:
12/03/2018
Assignee
1
3-4, KANDAKAJI-CHO, CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondence name and address
VOLPE KOENIG
30 SOUTH 17TH STREET, 18TH FLOOR
PHILADELPHIA, NJ 19103

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