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Reel/Frame:057310/0738   Pages: 4
Recorded: 08/27/2021
Attorney Dkt #:P20210046US00
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
17446218
Filing Dt:
08/27/2021
Publication #:
Pub Dt:
10/20/2022
Title:
OXIDATION TO MITIGATE DRY ETCH AND/OR WET ETCH FLUORINE RESIDUE
Assignors
1
Exec Dt:
08/03/2021
2
Exec Dt:
08/03/2021
3
Exec Dt:
08/03/2021
4
Exec Dt:
08/13/2021
5
Exec Dt:
08/03/2021
Assignee
1
8, LI-HSIN RD. 6 HSINCHU SCIENCE PARK
HSINCHU, TAIWAN 300-78
Correspondence name and address
HARRITY & HARRITY, LLP
11350 RANDOM HILLS ROAD
SUITE 600
FAIRFAX, VA 22030

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