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Reel/Frame:057419/0931   Pages: 4
Recorded: 09/09/2021
Attorney Dkt #:17522US01
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
17469895
Filing Dt:
09/09/2021
Publication #:
Pub Dt:
03/24/2022
Title:
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Assignors
1
Exec Dt:
09/03/2021
2
Exec Dt:
09/03/2021
3
Exec Dt:
09/03/2021
4
Exec Dt:
09/03/2021
Assignee
1
3-1 AKASAKA 5-CHOME,
MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondence name and address
XSENSUS, LLP
100 DAINGERFIELD ROAD,
SUITE 402
ALEXANDRIA, VA 22314

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