Patent Assignment Details
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Reel/Frame: | 058089/0502 | |
| Pages: | 20 |
| | Recorded: | 11/11/2021 | | |
Attorney Dkt #: | HITACHI12-0001685US02 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/21/2021
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Application #:
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16793678
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Filing Dt:
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02/18/2020
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Publication #:
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Pub Dt:
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06/11/2020
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Title:
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Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
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Assignee
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3-4, KANDAKAJI-CHO, CHIYODA-KU |
TOKYO, JAPAN 1010045 |
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Correspondence name and address
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VOLPE KOENIG
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30 SOUTH 17TH STREET
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18TH FLOOR
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PHILADELPHIA, PA 19103
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