Patent Assignment Details
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Reel/Frame: | 058434/0636 | |
| Pages: | 7 |
| | Recorded: | 12/20/2021 | | |
Attorney Dkt #: | HITACHI12-0003171US03 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/24/2022
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Application #:
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16802322
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Filing Dt:
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02/26/2020
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Publication #:
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Pub Dt:
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01/28/2021
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY SETTING PROCESS CHAMBER MAINTENANCE ENABLE STATE
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Assignee
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3-4, KANDAKAJI-CHO |
CHIYODA-KU |
TOKYO, JAPAN 1010045 |
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Correspondence name and address
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VOLPE KOENIG
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30 SOUTH 17TH STREET
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18TH FLOOR
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PHILADELPHIA, PA 19103
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05/05/2024 01:06 PM
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