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Total properties:
10
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Patent #:
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Issue Dt:
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03/01/2016
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Application #:
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13834608
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Filing Dt:
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03/15/2013
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Publication #:
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Pub Dt:
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09/18/2014
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Title:
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METHODS OF FORMING ALIGNMENT MARKS AND OVERLAY MARKS ON INTEGRATED CIRCUIT PRODUCTS EMPLOYING FINFET DEVICES AND THE RESULTING ALIGNMENT/OVERLAY MARK
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Patent #:
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Issue Dt:
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06/16/2015
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Application #:
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13968348
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Filing Dt:
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08/15/2013
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Publication #:
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Pub Dt:
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02/19/2015
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Title:
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METROLOGY MARKS FOR UNIDIRECTIONAL GRATING SUPERPOSITION PATTERNING PROCESSES
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Patent #:
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Issue Dt:
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04/21/2020
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Application #:
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15681007
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Filing Dt:
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08/18/2017
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Publication #:
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Pub Dt:
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02/21/2019
| | | | |
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Title:
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OVERLAY MARK STRUCTURES
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Patent #:
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Issue Dt:
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11/19/2019
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Application #:
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15860775
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Filing Dt:
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01/03/2018
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Publication #:
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Pub Dt:
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07/04/2019
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Title:
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OVERLAY STRUCTURES
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Patent #:
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Issue Dt:
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07/07/2020
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Application #:
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15869150
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Filing Dt:
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01/12/2018
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Publication #:
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Pub Dt:
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07/18/2019
| | | | |
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Title:
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SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY MEASUREMENT
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Patent #:
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Issue Dt:
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12/10/2019
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Application #:
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15904853
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Filing Dt:
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02/26/2018
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Publication #:
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Pub Dt:
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08/29/2019
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Title:
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STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
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07/07/2020
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Application #:
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15985838
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Filing Dt:
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05/22/2018
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Publication #:
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Pub Dt:
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11/28/2019
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Title:
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ASYMMETRIC OVERLAY MARK FOR OVERLAY MEASUREMENT
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|
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Patent #:
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Issue Dt:
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11/10/2020
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Application #:
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16654354
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Filing Dt:
|
10/16/2019
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Publication #:
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Pub Dt:
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02/13/2020
| | | | |
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Title:
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STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTOR DEVICES
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|
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Patent #:
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Issue Dt:
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06/15/2021
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Application #:
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16679826
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Filing Dt:
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11/11/2019
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Publication #:
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Pub Dt:
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05/13/2021
| | | | |
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Title:
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OVERLAY OPTIMIZATION
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Patent #:
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Issue Dt:
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01/25/2022
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Application #:
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16847721
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Filing Dt:
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04/14/2020
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Publication #:
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Pub Dt:
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07/30/2020
| | | | |
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Title:
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SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY MEASUREMENT
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