Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 058469/0667 | |
| Pages: | 4 |
| | Recorded: | 12/23/2021 | | |
| Attorney Dkt #: | 9563-2US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17438639
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Filing Dt:
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09/13/2021
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Publication #:
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Pub Dt:
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07/14/2022
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Title:
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RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEMPERATURE TRANSIENTS OF MULTI-ZONE SUBSTRATE SUPPORTS
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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5445 CORPORATE DRIVE
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SUITE 200
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TROY, MI 48098
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