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Patent #:
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Issue Dt:
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06/06/2000
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Application #:
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09003025
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Filing Dt:
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01/05/1998
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Title:
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LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING INSTALLATIONS
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09003542
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Filing Dt:
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01/06/1998
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Title:
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METHOD FOR ELECTRONICALLY TRACKING CONTAINERS TO AVOID MISPROCESSING OF CONTENTS
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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09008615
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Filing Dt:
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01/16/1998
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Title:
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ROBOT MOUNTING DE-COUPLING TECHNIQUE
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09044820
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Filing Dt:
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03/20/1998
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Title:
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METHOD OF TRANSFERRING SUBSTRATES WITH TWO DIFFERENT SUBSTRATE HOLDING END EFFECTORS
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09049314
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Filing Dt:
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03/27/1998
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Title:
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SUBSTRATE PROCESSING APPARATUS WITH SMALL BATCH LOAD LOCK
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Patent #:
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Issue Dt:
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03/09/1999
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Application #:
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09049315
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Filing Dt:
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03/27/1998
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Title:
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METERED GAS CONTROL IN A SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/26/2000
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Application #:
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09049330
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Filing Dt:
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03/27/1998
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Title:
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KINEMATIC COUPLING COMPATIBLE PASSIVE INTERFACE SEAL
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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09049461
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Filing Dt:
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03/27/1998
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Title:
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EVACUATION-DRIVEN SMIF POD PURGE SYSTEM
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Patent #:
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Issue Dt:
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06/20/2000
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Application #:
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09050321
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Filing Dt:
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03/30/1998
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Title:
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PROGRAMMABLE SUBSTRATE SUPPORT FOR A SUBSTRATE POSITIONING SYSTEM
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Patent #:
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Issue Dt:
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04/15/2003
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Application #:
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09072097
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Filing Dt:
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05/04/1998
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH COAXIAL DRIVE SHAFTS AND DUAL INDEPENDENT SCARA ARMS
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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09083834
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Filing Dt:
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05/22/1998
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Title:
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METHOD AND APPARATUS FOR VERTICAL TRANSFER OF A SEMICONDUCTOR WAFER CASSETTE
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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09084457
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Filing Dt:
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05/26/1998
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Title:
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SINGLE SUBSTRATE LOAD LOCK WITH OFFSET COOL MODULE AND BUFFER CHAMBER
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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09084754
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Filing Dt:
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05/26/1998
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Title:
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DUAL PLATE GAS ASSISTED HEATER MODULE
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09089752
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Filing Dt:
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06/02/1998
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Title:
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APPARATUS AND METHOD FOR TRANSPORTING SUBSTRATES
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09097561
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Filing Dt:
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06/15/1998
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Title:
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VOLUMETRIC AIRFLOW INDICATOR AND CONTROL DEVICE
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09113599
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Filing Dt:
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07/10/1998
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Title:
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DUAL ARM SUBSTRATE HANDLING ROBOT WITH A BATCH LOADER
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09113784
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Filing Dt:
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07/10/1998
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Title:
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MATERIAL HANDLING DEVICE WITH OVERCENTER ARMS AND METHOD FOR USE THEREOF
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09114711
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Filing Dt:
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07/13/1998
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Title:
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POD DOOR ALIGNMENT DEVICE
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09115414
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Filing Dt:
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07/14/1998
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Title:
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POD DOOR TO PORT DOOR RETENTION SYSTEM
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09115414
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Filing Dt:
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07/14/1998
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Title:
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POD DOOR TO PORT DOOR RETENTION SYSTEM
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09115526
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Filing Dt:
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07/13/1998
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Title:
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ERGONOMIC, VARIABLE SIZE, BOTTOM OPENING SYSTEM COMPATIBLE WITH A VERTICAL INTERFACE
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09127278
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Filing Dt:
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07/31/1998
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Title:
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FILTER CARTRIDGE ASSEMBLY
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09130254
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Filing Dt:
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08/06/1998
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Title:
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POD TO PORT DOOR RETENTION AND EVACUATION SYSTEM
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09145008
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Filing Dt:
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09/01/1998
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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09145704
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Filing Dt:
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09/02/1998
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Title:
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TILT AND GO LOAD PORT INTERFACE ALIGNMENT SYSTEM
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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09158559
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Filing Dt:
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09/22/1998
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Title:
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DEVICE FOR THE TRANSFER OF AN OBJECT BETWEEN AT LEAST TWO LOCATIONS
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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09158560
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Filing Dt:
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09/22/1998
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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SAFETY DEVICE FOR A MOVING SYSTEM
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09162334
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Filing Dt:
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09/28/1998
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Title:
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METHOD FOR IN-CASSETTE WAFER CENTER DETERMINATION
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Patent #:
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Issue Dt:
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11/01/2005
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Application #:
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09163844
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Filing Dt:
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09/30/1998
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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09170557
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Filing Dt:
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10/13/1998
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Title:
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DEVICE FOR ALIGNING AND COUPLING AT LEAST A PARTIAL REGION FO A MOVABLE OBJECT TO A DESTINATION
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09170575
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Filing Dt:
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10/13/1998
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Title:
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DEVICE FOR CONTROLLING THE DRIVE OF MECHANISMS OPERATING SEPARATELY FROM ONE ANOTHER
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Patent #:
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Issue Dt:
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04/18/2000
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Application #:
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09172945
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Filing Dt:
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10/14/1998
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Title:
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MODULAR FILTER FAN UNIT
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09173710
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Filing Dt:
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10/15/1998
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Title:
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WAFER MAPPING SYSTEM
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09176476
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Filing Dt:
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10/21/1998
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Title:
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DOCKING AND ENVIRONMENTAL PURGING SYSTEM FOR INTEGRATED CIRCUIT WAFER TRANSPORT ASSEMBLIES
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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09184561
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Filing Dt:
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11/02/1998
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Title:
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DEVICE FOR RECEIVING TRANSPORT CONTAINERS AT A LOADING AND UNLOADING STATION
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09184562
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Filing Dt:
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11/02/1998
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Publication #:
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Pub Dt:
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11/22/2001
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Title:
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DEVICE AND METHOD FOR DETECTING AND DISTINGUISHING SHELF-FORMING SUPPORTS IN CASSETTES AND DISK-SHAPED OBJECTS DEPOSITED THEREON
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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09185222
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Filing Dt:
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11/03/1998
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Title:
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AUTOMATED DOOR ASSEMBLY FOR USE IN SEMICONDUCTOR WAFER MANUFACTURING
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09204320
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Filing Dt:
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12/02/1998
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Title:
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PASSIVELY ACTIVATED VALVE FOR CARRIER PURGING
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09204747
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Filing Dt:
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12/02/1998
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Title:
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ROBOT ARM WITH SPECIMEN EDGE GRIPPING END EFFECTOR
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Patent #:
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Issue Dt:
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07/09/2002
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Application #:
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09207957
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Filing Dt:
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12/09/1998
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Title:
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INTEGRATED MATERIAL MANAGEMENT MODULE
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|
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Patent #:
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Issue Dt:
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12/26/2000
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Application #:
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09216011
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Filing Dt:
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12/16/1998
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Title:
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WAFER CARRIER ADAPTER AND METHOD FOR USE THEREOF
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09223508
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Filing Dt:
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12/30/1998
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Publication #:
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Pub Dt:
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11/01/2001
| | | | |
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE ARMS ON A COMMON AXIS OF ROTATION
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|
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09224134
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Filing Dt:
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12/31/1998
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Title:
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SELF-TEACHING ROBOT ARM POSITION METHOD
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|
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Patent #:
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Issue Dt:
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10/26/1999
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Application #:
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09227177
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Filing Dt:
|
01/07/1999
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Title:
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SEMICONDUCTOR WAFER CASSETTE POSITIONING AND DETECTION MECHANISM
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|
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|
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Patent #:
|
|
Issue Dt:
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12/12/2000
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Application #:
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09228305
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Filing Dt:
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01/12/1999
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH DOUBLE SUBSTRATE HOLDERS
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09243516
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Filing Dt:
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02/01/1999
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Title:
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SUBSTRATE CARRIER AS BATCHLOADER
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09247695
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Filing Dt:
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02/10/1999
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Title:
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RETICLE TRANSFER SYSTEM
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Patent #:
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Issue Dt:
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11/14/2000
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Application #:
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09263618
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Filing Dt:
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03/05/1999
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Title:
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ARRANGEMENT FOR THE DETECTION OF DISK -SHAPED OBJECTS IN A CASSETTE
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Patent #:
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Issue Dt:
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04/04/2000
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Application #:
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09274067
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Filing Dt:
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03/22/1999
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Title:
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METHOD OF HEATING A SUBSTRATE WITH MULTIPLE SELECTIVELY DEACTUATED HEATERS
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09280751
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Filing Dt:
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03/29/1999
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Title:
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HYBRID HEATER WITH CERAMIC FOIL SERRATED PLATE AND GAS ASSIST
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09312343
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Filing Dt:
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05/14/1999
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Title:
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ROBOT ARM WITH SPECIMEN SENSING AND EDGE GRIPPING END EFFECTOR
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Patent #:
|
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Issue Dt:
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09/02/2003
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Application #:
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09313945
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Filing Dt:
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05/18/1999
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Title:
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CASSETTE BUFFERING WITHIN A MINIENVIRONMENT
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09314654
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Filing Dt:
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05/19/1999
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Title:
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CORROSION RESISTANT EXOSKELETON ARM LINKAGE ASSEMBLY
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09318993
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Filing Dt:
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05/26/1999
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Title:
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SEAL RING USING GAS CURTAIN
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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09322858
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Filing Dt:
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05/28/1999
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Title:
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SYSTEM OF TRAJECTORY PLANINING FOR ROBOTIC MANIPULATORS BASED ON PRE-DEFINED TIME-OPTIMUM TRAJECTORY SHAPES
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09323591
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Filing Dt:
|
06/01/1999
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Title:
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AIRFLOW CONTROL VALVE FOR A CLEAN ROOM
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Patent #:
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Issue Dt:
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07/11/2000
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Application #:
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09343110
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Filing Dt:
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06/29/1999
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Title:
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METHOD FOR SUPPLYING WAFERS TO AN IC MANUFACTURING PROCESS
|
|
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|
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09346166
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Filing Dt:
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07/01/1999
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Title:
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UNIVERSAL TOOL INTERFACE AND/OR WORKPIECE TRANSFER APPARATUS FOR SMIF AND OPEN POD APPLICATIONS
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Patent #:
|
|
Issue Dt:
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11/20/2001
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Application #:
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09351986
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Filing Dt:
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07/12/1999
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Title:
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SMIF-COMPATIBLE OPEN CASSETTE ENCLOSURE
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|
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Patent #:
|
|
Issue Dt:
|
08/28/2001
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Application #:
|
09352155
|
Filing Dt:
|
07/12/1999
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|
Title:
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FIMS TRANSPORT BOX LOAD INTERFACE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2001
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Application #:
|
09362490
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Filing Dt:
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07/28/1999
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Publication #:
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Pub Dt:
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11/15/2001
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS WITH VERTICALLY STACKED LOAD LOCK AND SUBSTRATE TRANSPORT ROBOT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/27/2001
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Application #:
|
09363159
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Filing Dt:
|
07/28/1999
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|
Title:
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SYSTEM FOR ALIGNING RECTANGULAR WAFERS
|
|
|
|
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Patent #:
|
|
Issue Dt:
|
10/30/2001
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Application #:
|
09433260
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Filing Dt:
|
11/04/1999
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|
Title:
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LOAD LOCK WITH VERTICALLY MOVABLE SUPPORT
|
|
|
|
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Patent #:
|
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Issue Dt:
|
07/17/2001
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Application #:
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09435702
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Filing Dt:
|
11/08/1999
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Title:
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MULTI-LEVEL SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09437628
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Filing Dt:
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11/10/1999
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Title:
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UNLIMITED ROTATION VACUUM ISOLATION WIRE FEEDTHROUGH
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Patent #:
|
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Issue Dt:
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11/12/2002
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Application #:
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09452059
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Filing Dt:
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11/30/1999
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Title:
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WAFER ORIENTING AND READING MECHANISM
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09452306
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Filing Dt:
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12/01/1999
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Title:
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SMALL FOOTPRINT CARRIER FRONT END LOADER
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09461151
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Filing Dt:
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12/14/1999
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Title:
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SYSTEM AND METHOD FOR CASCADE CONTROL OF TEMPERATURE AND HUMIDITY FOR SEMI-CONDUCTOR MANUFACTURING ENVIRONMENTS
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Patent #:
|
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Issue Dt:
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10/22/2002
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Application #:
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09461498
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Filing Dt:
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12/14/1999
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Title:
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INTEGRATED INTRA-BAY TRANSFER, STORAGE, AND DELIVERY SYSTEM
|
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|
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09483625
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Filing Dt:
|
01/14/2000
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Title:
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WORKPIECE HANDLING ROBOT
|
|
|
|
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Patent #:
|
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Issue Dt:
|
10/08/2002
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Application #:
|
09496865
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Filing Dt:
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02/02/2000
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Title:
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LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING INSTALLATIONS
|
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|
|
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Patent #:
|
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Issue Dt:
|
04/23/2002
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Application #:
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09497057
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Filing Dt:
|
02/02/2000
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Title:
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Loading and unloading station for semiconductor processing installations
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Patent #:
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Issue Dt:
|
03/23/2004
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Application #:
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09507556
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Filing Dt:
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02/18/2000
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Title:
|
SYSTEM FOR INSTALLATION, MAINTENANCE AND REMOVAL OF MINIENVIRONMENT COMPONENTS
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09517377
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Filing Dt:
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03/02/2000
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Title:
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APPARATUS AND METHOD FOR USING A ROBOT TO REMOVE A SUBSTRATE CARRIER DOOR
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Patent #:
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Issue Dt:
|
09/24/2002
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Application #:
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09527537
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Filing Dt:
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03/16/2000
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Title:
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PERSON-GUIDED VEHICLE
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Patent #:
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Issue Dt:
|
06/25/2002
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Application #:
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09541284
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Filing Dt:
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04/03/2000
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Title:
|
ERGONOMIC LOAD PORT
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Patent #:
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Issue Dt:
|
12/04/2001
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Application #:
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09547551
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Filing Dt:
|
04/12/2000
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Title:
|
System for parallel processing of workpieces
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Patent #:
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Issue Dt:
|
02/18/2003
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Application #:
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09547829
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Filing Dt:
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04/12/2000
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Title:
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MODULAR SORTER
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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09549268
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Filing Dt:
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04/14/2000
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Title:
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SYSTEM AND METHOD FOR CONTROL AND SIMULATION
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09559720
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Filing Dt:
|
04/26/2000
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Title:
|
Dual plate gas assisted heater module
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Patent #:
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Issue Dt:
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06/18/2002
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Application #:
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09574127
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Filing Dt:
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05/19/2000
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Title:
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SELF SUPPORTING CABLE FOR USE WITH LINEAR MOTION DEVICES
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09588392
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Filing Dt:
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06/06/2000
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Title:
|
Material transport system
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Patent #:
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Issue Dt:
|
07/09/2002
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Application #:
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09592471
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Filing Dt:
|
06/09/2000
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Title:
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PERIODIC SCHEDULER FOR DUAL-ARM ROBOTS IN CLUSTER TOOLS WITH PROCESS-MODULE RESIDENCY CONSTRAINTS
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09593245
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Filing Dt:
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06/13/2000
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Title:
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POD LOADER INTERFACE END EFFECTORS
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Patent #:
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Issue Dt:
|
10/14/2003
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Application #:
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09603295
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Filing Dt:
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06/23/2000
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Title:
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SUBSTRATE HANDLING ROBOT WITH A BATCH LOADER AND INDIVIDUAL VACUUM CONTROL AT BATCH LOADER PADDLES
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09612757
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Filing Dt:
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07/10/2000
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Title:
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POD LOAD INTERFACE EQUIPMENT ADAPTED FOR IMPLEMENTATION IN A FIMS SYSTEM
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|
|
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Patent #:
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Issue Dt:
|
07/08/2003
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Application #:
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09641032
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Filing Dt:
|
08/16/2000
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Title:
|
SMART LOAD PORT WITH INTEGRATED CARRIER MONITORING AND FAB-WIDE CARRIER MANAGEMENT SYSTEM
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|
|
|
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Patent #:
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Issue Dt:
|
09/10/2002
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Application #:
|
09641996
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Filing Dt:
|
08/18/2000
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|
Title:
|
AUTOMATED DOOR ASSEMBLY FOR USE IN SEMICONDUCTOR WAFER MANUFACTURING
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|
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Patent #:
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|
Issue Dt:
|
05/20/2003
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Application #:
|
09649374
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Filing Dt:
|
08/28/2000
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Title:
|
OBSERVER-CORRECTOR CONTROL SYSTEM FOR SYSTEMS WITH UNMODELED DYNAMICS
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|
|
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Patent #:
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Issue Dt:
|
07/16/2002
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Application #:
|
09723629
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Filing Dt:
|
11/28/2000
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|
Title:
|
FIMS INTERFACE WITHOUT ALIGNMENT PINS
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|
|
|
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Patent #:
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Issue Dt:
|
07/08/2003
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Application #:
|
09729463
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Filing Dt:
|
12/04/2000
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Publication #:
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Pub Dt:
|
06/06/2002
| | | | |
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Title:
|
SELF TEACHING ROBOT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/10/2003
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Application #:
|
09729737
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Filing Dt:
|
12/04/2000
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|
Publication #:
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Pub Dt:
|
06/06/2002
| | | | |
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Title:
|
WAFER TRANSPORT SYSTEM
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|
|
|
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Patent #:
|
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Issue Dt:
|
04/22/2003
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Application #:
|
09773143
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Filing Dt:
|
01/31/2001
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Publication #:
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Pub Dt:
|
06/21/2001
| | | | |
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Title:
|
DEVICE FOR CONTROLLING THE DRIVE OF MECHANISMS OPERATING SEPARATELY FROM ONE ANOTHER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/16/2003
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Application #:
|
09788034
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Filing Dt:
|
02/16/2001
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Publication #:
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Pub Dt:
|
08/22/2002
| | | | |
|
Title:
|
PELLICLE MOUNTING APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
|
09/17/2002
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Application #:
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09809598
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Filing Dt:
|
03/15/2001
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|
Publication #:
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Pub Dt:
|
09/19/2002
| | | | |
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Title:
|
SEMICONDUCTOR WAFER IMAGING SYSTEM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/02/2002
|
Application #:
|
09841539
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Filing Dt:
|
04/24/2001
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|
Publication #:
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Pub Dt:
|
09/06/2001
| | | | |
|
Title:
|
Self-teaching robot arm position method to compensate for support structure component alignment offset
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/06/2006
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Application #:
|
09842370
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Filing Dt:
|
04/25/2001
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|
Publication #:
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Pub Dt:
|
11/29/2001
| | | | |
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Title:
|
RETICLE MANAGEMENT SYSTEM
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09863775
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Filing Dt:
|
05/23/2001
|
|
Publication #:
|
|
Pub Dt:
|
10/25/2001
| | | | |
|
Title:
|
DUAL MULTITRAN ROBOT ARM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/29/2002
|
Application #:
|
09873691
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Filing Dt:
|
06/04/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/14/2002
| | | | |
|
Title:
|
INTELLIGENT MINIENVIRONMENT
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09882215
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Filing Dt:
|
06/15/2001
|
|
Publication #:
|
|
Pub Dt:
|
12/19/2002
| | | | |
|
Title:
|
Automated cassette opening
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|
