Total properties:
212
Page
1
of
3
Pages:
1 2 3
|
|
Patent #:
|
|
Issue Dt:
|
03/22/2005
|
Application #:
|
09689476
|
Filing Dt:
|
10/12/2000
|
Title:
|
PULSED OPERATION OF HALL-CURRENT ION SOURCES
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/2005
|
Application #:
|
09855485
|
Filing Dt:
|
05/14/2001
|
Title:
|
MACHINE-INDEPENDENT ALIGNMENT SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
07/20/2004
|
Application #:
|
10038483
|
Filing Dt:
|
01/03/2002
|
Publication #:
|
|
Pub Dt:
|
03/11/2004
| | | | |
Title:
|
HIGH DENSITY INTERCONNECTS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/23/2004
|
Application #:
|
10041392
|
Filing Dt:
|
01/08/2002
|
Publication #:
|
|
Pub Dt:
|
07/10/2003
| | | | |
Title:
|
METHOD FOR FORMING SOLDER CONNECTIONS ON A CIRCUITIZED SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/2005
|
Application #:
|
10046426
|
Filing Dt:
|
01/16/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
REACTOR HAVING A MOVABLE SHUTTER
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2004
|
Application #:
|
10052591
|
Filing Dt:
|
01/18/2002
|
Publication #:
|
|
Pub Dt:
|
07/24/2003
| | | | |
Title:
|
HIGH DENSITY RAISED STUD MICROJOINING SYSTEM AND METHODS OF FABRICATING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
12/09/2003
|
Application #:
|
10052620
|
Filing Dt:
|
01/18/2002
|
Publication #:
|
|
Pub Dt:
|
07/24/2003
| | | | |
Title:
|
HIGH DENSITY AREA ARRAY SOLDER MICROJOINING INTERCONNECT STRUCTURE AND FABRICATION METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2006
|
Application #:
|
10102242
|
Filing Dt:
|
03/19/2002
|
Publication #:
|
|
Pub Dt:
|
03/13/2003
| | | | |
Title:
|
GONIOMETER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/24/2003
|
Application #:
|
10119491
|
Filing Dt:
|
04/09/2002
|
Title:
|
METHOD AND STRUCTURE FOR JOINING TWO SUBSTRATES WITH A LOW MELT SOLDER JOINT
|
|
|
Patent #:
|
|
Issue Dt:
|
04/06/2004
|
Application #:
|
10126928
|
Filing Dt:
|
04/19/2002
|
Title:
|
METHOD AND APPARATUS FOR CONTROLLING FILM PROFILES ON TOPOGRAPHIC FEATURES
|
|
|
Patent #:
|
|
Issue Dt:
|
05/25/2004
|
Application #:
|
10145467
|
Filing Dt:
|
05/13/2002
|
Publication #:
|
|
Pub Dt:
|
11/13/2003
| | | | |
Title:
|
SMT PASSIVE DEVICE NOFLOW UNDERFILL METHODOLOGY AND STRUCTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
07/22/2003
|
Application #:
|
10151075
|
Filing Dt:
|
05/17/2002
|
Title:
|
METHOD OF FORMING A LEAD-FREE TIN-SILVER-COPPER BASED SOLDER ALLOY ON AN ELECTRONIC SUBSTRATE.
|
|
|
Patent #:
|
|
Issue Dt:
|
12/23/2003
|
Application #:
|
10162830
|
Filing Dt:
|
06/04/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
BALL GRID ARRAY MODULE AND METHOD OF MANUFACTURING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/2003
|
Application #:
|
10215451
|
Filing Dt:
|
08/09/2002
|
Title:
|
NEGATIVE VOLUME EXPANSION LEAD-FREE ELECTRICAL CONNECTION
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2005
|
Application #:
|
10248976
|
Filing Dt:
|
03/06/2003
|
Publication #:
|
|
Pub Dt:
|
09/09/2004
| | | | |
Title:
|
DUAL-SOLDER FLIP-CHIP SOLDER BUMP
|
|
|
Patent #:
|
|
Issue Dt:
|
07/12/2005
|
Application #:
|
10249621
|
Filing Dt:
|
04/24/2003
|
Publication #:
|
|
Pub Dt:
|
10/28/2004
| | | | |
Title:
|
LEAD-FREE ALLOYS FOR COLUMN/BALL GRID ARRAYS, ORGANIC INTERPOSERS AND PASSIVE COMPONENT ASSEMBLY
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/2003
|
Application #:
|
10262753
|
Filing Dt:
|
10/01/2002
|
Title:
|
SELECTIVE C4 CONNECTION IN IC PACKAGING
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/2004
|
Application #:
|
10263849
|
Filing Dt:
|
10/03/2002
|
Publication #:
|
|
Pub Dt:
|
08/07/2003
| | | | |
Title:
|
MULTI-LAYERED INTERCONNECT STRUCTURE USING LIQUID CRYSTALLINE POLYMER DIELECTRIC
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2004
|
Application #:
|
10287864
|
Filing Dt:
|
11/06/2002
|
Publication #:
|
|
Pub Dt:
|
05/06/2004
| | | | |
Title:
|
LASER SCANNING APPARATUS AND METHODS FOR THERMAL PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2005
|
Application #:
|
10330567
|
Filing Dt:
|
12/27/2002
|
Publication #:
|
|
Pub Dt:
|
07/01/2004
| | | | |
Title:
|
LARGE-FIELD UNIT-MAGNIFICATION PROJECTION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
|
Application #:
|
10336066
|
Filing Dt:
|
01/02/2003
|
Publication #:
|
|
Pub Dt:
|
07/08/2004
| | | | |
Title:
|
VARIABLE NUMERICAL APERTURE LARGE-FIELD UNIT-MAGNIFICATION PROJECTION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/03/2004
|
Application #:
|
10371466
|
Filing Dt:
|
02/21/2003
|
Publication #:
|
|
Pub Dt:
|
11/27/2003
| | | | |
Title:
|
SELECTIVE FILLING OF ELECTRICALLY CONDUCTIVE VIAS FOR THREE DIMENSIONAL DEVICE STRUCTURES
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
|
Application #:
|
10390504
|
Filing Dt:
|
03/13/2003
|
Title:
|
METHOD AND SYSTEM FOR LASER THERMAL PROCESSING OF SEMICONDUCTOR DEVICES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/2005
|
Application #:
|
10447128
|
Filing Dt:
|
05/27/2003
|
Publication #:
|
|
Pub Dt:
|
12/02/2004
| | | | |
Title:
|
DEEP ULTRAVIOLET UNIT-MAGNIFICATION PROJECTION OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/2004
|
Application #:
|
10605752
|
Filing Dt:
|
10/23/2003
|
Publication #:
|
|
Pub Dt:
|
11/25/2004
| | | | |
Title:
|
IMPROVEMENTS IN GROUNDING AND THERMAL DISSIPATION FOR INTEGRATED CIRCUIT PACKAGES
|
|
|
Patent #:
|
|
Issue Dt:
|
07/27/2010
|
Application #:
|
10653625
|
Filing Dt:
|
09/02/2003
|
Publication #:
|
|
Pub Dt:
|
03/03/2005
| | | | |
Title:
|
LASER THERMAL PROCESSING WITH LASER DIODE RADIATION
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2006
|
Application #:
|
10674106
|
Filing Dt:
|
09/29/2003
|
Publication #:
|
|
Pub Dt:
|
03/31/2005
| | | | |
Title:
|
LASER THERMAL ANNEALING OF LIGHTLY DOPED SILICON SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/2004
|
Application #:
|
10692065
|
Filing Dt:
|
10/23/2003
|
Publication #:
|
|
Pub Dt:
|
05/06/2004
| | | | |
Title:
|
HIGH DENSITY AREA ARRAY SOLDER MICROJOINING INTERCONNECT STRUCTURE AND FABRICATION METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
08/29/2006
|
Application #:
|
10762861
|
Filing Dt:
|
01/22/2004
|
Publication #:
|
|
Pub Dt:
|
05/19/2005
| | | | |
Title:
|
LASER THERMAL ANNEALING OF LIGHTLY DOPED SILICON SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
02/27/2007
|
Application #:
|
10772132
|
Filing Dt:
|
02/04/2004
|
Publication #:
|
|
Pub Dt:
|
08/26/2004
| | | | |
Title:
|
CHARGED PARTICLE SOURCE AND OPERATION THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/2007
|
Application #:
|
10806014
|
Filing Dt:
|
03/22/2004
|
Publication #:
|
|
Pub Dt:
|
09/09/2004
| | | | |
Title:
|
LASER SCANNING APPARATUS AND METHODS FOR THERMAL PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2011
|
Application #:
|
10915745
|
Filing Dt:
|
08/11/2004
|
Publication #:
|
|
Pub Dt:
|
02/17/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR SURFACE PROCESSING OF A SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2006
|
Application #:
|
10976971
|
Filing Dt:
|
10/29/2004
|
Title:
|
HIGH NA LARGE-FIELD UNIT-MAGNIFICATION PROJECTION OPTICAL SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2006
|
Application #:
|
10980110
|
Filing Dt:
|
11/01/2004
|
Publication #:
|
|
Pub Dt:
|
05/04/2006
| | | | |
Title:
|
APOCHROMATIC UNIT-MAGNIFICATION PROJECTION OPTICAL SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/29/2011
|
Application #:
|
10993017
|
Filing Dt:
|
11/18/2004
|
Title:
|
BRIDGE ROW TOOL
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2010
|
Application #:
|
11001954
|
Filing Dt:
|
12/01/2004
|
Publication #:
|
|
Pub Dt:
|
06/01/2006
| | | | |
Title:
|
HEATED CHUCK FOR LASER THERMAL PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/2007
|
Application #:
|
11052239
|
Filing Dt:
|
02/07/2005
|
Publication #:
|
|
Pub Dt:
|
07/07/2005
| | | | |
Title:
|
DEEP ULTRAVIOLET UNIT-MAGNIFICATION PROJECTION OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/2008
|
Application #:
|
11061254
|
Filing Dt:
|
02/18/2005
|
Publication #:
|
|
Pub Dt:
|
11/10/2005
| | | | |
Title:
|
FLUID-COOLED ION SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/2007
|
Application #:
|
11112647
|
Filing Dt:
|
04/22/2005
|
Publication #:
|
|
Pub Dt:
|
10/26/2006
| | | | |
Title:
|
HEAT SHIELD FOR THERMAL PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
08/04/2009
|
Application #:
|
11127834
|
Filing Dt:
|
05/12/2005
|
Publication #:
|
|
Pub Dt:
|
12/29/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR MEASURING THE CURVATURE OF REFLECTIVE SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
10/02/2007
|
Application #:
|
11129548
|
Filing Dt:
|
05/13/2005
|
Publication #:
|
|
Pub Dt:
|
10/06/2005
| | | | |
Title:
|
REACTOR HAVING A MOVABLE SHUTTER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/19/2012
|
Application #:
|
11167570
|
Filing Dt:
|
06/27/2005
|
Publication #:
|
|
Pub Dt:
|
02/02/2006
| | | | |
Title:
|
VAPOR DEPOSITION SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2010
|
Application #:
|
11395354
|
Filing Dt:
|
03/31/2006
|
Publication #:
|
|
Pub Dt:
|
11/09/2006
| | | | |
Title:
|
GRID TRANSPARENCY AND GRID HOLE PATTERN CONTROL FOR ION BEAM UNIFORMITY
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2011
|
Application #:
|
11478171
|
Filing Dt:
|
06/29/2006
|
Publication #:
|
|
Pub Dt:
|
11/02/2006
| | | | |
Title:
|
LASER THERMAL ANNEALING OF LIGHTLY DOPED SILICON SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/17/2015
|
Application #:
|
11544075
|
Filing Dt:
|
10/06/2006
|
Publication #:
|
|
Pub Dt:
|
06/14/2007
| | | | |
Title:
|
Density-matching alkyl push flow for vertical flow rotating disk reactors
|
|
|
Patent #:
|
|
Issue Dt:
|
07/07/2009
|
Application #:
|
11678979
|
Filing Dt:
|
02/26/2007
|
Publication #:
|
|
Pub Dt:
|
08/23/2007
| | | | |
Title:
|
ION SOURCES AND METHODS FOR GENERATING AN ION BEAM WITH A CONTROLLABLE ION CURRENT DENSITY DISTRIBUTION
|
|
|
Patent #:
|
|
Issue Dt:
|
08/10/2010
|
Application #:
|
11689570
|
Filing Dt:
|
03/22/2007
|
Publication #:
|
|
Pub Dt:
|
09/25/2008
| | | | |
Title:
|
METHOD OF REMOVING METALLIC, INORGANIC AND ORGANIC CONTAMINANTS FROM CHIP PASSIVATION LAYER SURFACES
|
|
|
Patent #:
|
|
Issue Dt:
|
04/17/2012
|
Application #:
|
11740592
|
Filing Dt:
|
04/26/2007
|
Publication #:
|
|
Pub Dt:
|
10/30/2008
| | | | |
Title:
|
APPARATUS FOR CATHODIC VACUUM-ARC COATING DEPOSITION
|
|
|
Patent #:
|
|
Issue Dt:
|
07/06/2010
|
Application #:
|
11741836
|
Filing Dt:
|
04/30/2007
|
Publication #:
|
|
Pub Dt:
|
10/30/2008
| | | | |
Title:
|
SILICON GERMANIUM HETEROJUNCTION BIPOLAR TRANSISTOR STRUCTURE AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2011
|
Application #:
|
11744874
|
Filing Dt:
|
05/06/2007
|
Title:
|
MINIMAL FORCE AIR BEARING FOR LAPPING TOOL
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2010
|
Application #:
|
11788192
|
Filing Dt:
|
04/18/2007
|
Publication #:
|
|
Pub Dt:
|
10/23/2008
| | | | |
Title:
|
METHODS OF FORMING A DENUDED ZONE IN A SEMICONDUCTOR WAFER USING RAPID LASER ANNEALING
|
|
|
Patent #:
|
|
Issue Dt:
|
06/29/2010
|
Application #:
|
11820558
|
Filing Dt:
|
06/20/2007
|
Title:
|
METHODS AND APPARATUS FOR TEMPERATURE MEASUREMENT AND CONTROL ON A REMOTE SUBSTRATE SURFACE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/05/2012
|
Application #:
|
11903727
|
Filing Dt:
|
09/24/2007
|
Publication #:
|
|
Pub Dt:
|
06/12/2008
| | | | |
Title:
|
THERMALLY ISOLATED CRYOPANEL FOR VACUUM DEPOSITION SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/14/2010
|
Application #:
|
11947720
|
Filing Dt:
|
11/29/2007
|
Publication #:
|
|
Pub Dt:
|
06/05/2008
| | | | |
Title:
|
ADAPTIVE CONTROLLER FOR ION SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
04/10/2012
|
Application #:
|
12008705
|
Filing Dt:
|
01/11/2008
|
Publication #:
|
|
Pub Dt:
|
07/24/2008
| | | | |
Title:
|
GAS TREATMENT SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/17/2012
|
Application #:
|
12037598
|
Filing Dt:
|
02/26/2008
|
Publication #:
|
|
Pub Dt:
|
07/31/2008
| | | | |
Title:
|
METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/08/2015
|
Application #:
|
12212844
|
Filing Dt:
|
09/18/2008
|
Publication #:
|
|
Pub Dt:
|
04/16/2009
| | | | |
Title:
|
Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/2011
|
Application #:
|
12286762
|
Filing Dt:
|
10/02/2008
|
Title:
|
DUAL-SIDED SUBSTRATE MEASUREMENT APPARATUS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/2010
|
Application #:
|
12405702
|
Filing Dt:
|
03/17/2009
|
Publication #:
|
|
Pub Dt:
|
09/23/2010
| | | | |
Title:
|
ACTIVATING DOPANTS USING MULTIPLE CONSECUTIVE MILLISECOND-RANGE ANNEALS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/2015
|
Application #:
|
12539443
|
Filing Dt:
|
08/11/2009
|
Publication #:
|
|
Pub Dt:
|
02/11/2010
| | | | |
Title:
|
Vacuum Deposition Sources Having Heated Effusion Orifices
|
|
|
Patent #:
|
|
Issue Dt:
|
12/11/2012
|
Application #:
|
12539458
|
Filing Dt:
|
08/11/2009
|
Publication #:
|
|
Pub Dt:
|
02/11/2010
| | | | |
Title:
|
ELECTRICAL CONTACTS FOR USE WITH VACUUM DEPOSITION SOURCES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/03/2015
|
Application #:
|
12609308
|
Filing Dt:
|
10/30/2009
|
Publication #:
|
|
Pub Dt:
|
09/30/2010
| | | | |
Title:
|
REACTION CHAMBER WITH REMOVABLE LINER
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/2016
|
Application #:
|
12609319
|
Filing Dt:
|
10/30/2009
|
Publication #:
|
|
Pub Dt:
|
07/01/2010
| | | | |
Title:
|
SYSTEM AND METHOD FOR THIN FILM DEPOSITION
|
|
|
Patent #:
|
|
Issue Dt:
|
07/16/2013
|
Application #:
|
12629467
|
Filing Dt:
|
12/02/2009
|
Publication #:
|
|
Pub Dt:
|
06/02/2011
| | | | |
Title:
|
METHOD FOR IMPROVING PERFORMANCE OF A SUBSTRATE CARRIER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/06/2012
|
Application #:
|
12631079
|
Filing Dt:
|
12/04/2009
|
Publication #:
|
|
Pub Dt:
|
06/10/2010
| | | | |
Title:
|
CHEMICAL VAPOR DEPOSITION FLOW INLET ELEMENTS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2011
|
Application #:
|
12690299
|
Filing Dt:
|
01/20/2010
|
Publication #:
|
|
Pub Dt:
|
07/21/2011
| | | | |
Title:
|
THROUGH SILICON VIA LITHOGRAPHIC ALIGNMENT AND REGISTRATION
|
|
|
Patent #:
|
|
Issue Dt:
|
06/23/2015
|
Application #:
|
12730800
|
Filing Dt:
|
03/24/2010
|
Publication #:
|
|
Pub Dt:
|
09/30/2010
| | | | |
Title:
|
DEPOSITION OF HIGH VAPOR PRESSURE MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/12/2013
|
Application #:
|
12777034
|
Filing Dt:
|
05/10/2010
|
Publication #:
|
|
Pub Dt:
|
09/02/2010
| | | | |
Title:
|
GRID TRANSPARENCY AND GRID HOLE PATTERN CONTROL FOR ION BEAM UNIFORMITY
|
|
|
Patent #:
|
|
Issue Dt:
|
06/11/2013
|
Application #:
|
12848540
|
Filing Dt:
|
08/02/2010
|
Publication #:
|
|
Pub Dt:
|
02/02/2012
| | | | |
Title:
|
EXHAUST FOR CVD REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
11/13/2012
|
Application #:
|
12898351
|
Filing Dt:
|
10/05/2010
|
Publication #:
|
|
Pub Dt:
|
04/05/2012
| | | | |
Title:
|
GRID PROVIDING BEAMLET STEERING
|
|
|
Patent #:
|
|
Issue Dt:
|
06/17/2014
|
Application #:
|
12906756
|
Filing Dt:
|
10/18/2010
|
Publication #:
|
|
Pub Dt:
|
04/19/2012
| | | | |
Title:
|
FAULT TOLERANT ION SOURCE POWER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/2016
|
Application #:
|
12951361
|
Filing Dt:
|
11/22/2010
|
Publication #:
|
|
Pub Dt:
|
04/21/2011
| | | | |
Title:
|
GAS TREATMENT SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/26/2016
|
Application #:
|
12967381
|
Filing Dt:
|
12/14/2010
|
Publication #:
|
|
Pub Dt:
|
08/25/2011
| | | | |
Title:
|
PROCESSING METHODS AND APPARATUS WITH TEMPERATURE DISTRIBUTION CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
04/05/2016
|
Application #:
|
12972270
|
Filing Dt:
|
12/17/2010
|
Publication #:
|
|
Pub Dt:
|
06/21/2012
| | | | |
Title:
|
Gas Injection System for Chemical Vapor Deposition Using Sequenced Valves
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/2014
|
Application #:
|
13037770
|
Filing Dt:
|
03/01/2011
|
Publication #:
|
|
Pub Dt:
|
09/08/2011
| | | | |
Title:
|
WAFER CARRIER WITH SLOPED EDGE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/25/2014
|
Application #:
|
13136019
|
Filing Dt:
|
07/20/2011
|
Publication #:
|
|
Pub Dt:
|
11/17/2011
| | | | |
Title:
|
ACTIVATING GAN LEDS BY LASER SPIKE ANNEALING AND FLASH ANNEALING
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2017
|
Application #:
|
13203602
|
Filing Dt:
|
11/08/2011
|
Publication #:
|
|
Pub Dt:
|
03/15/2012
| | | | |
Title:
|
ALD SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2017
|
Application #:
|
13304676
|
Filing Dt:
|
11/27/2011
|
Publication #:
|
|
Pub Dt:
|
03/22/2012
| | | | |
Title:
|
VAPOR DEPOSITION SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/2014
|
Application #:
|
13331112
|
Filing Dt:
|
12/20/2011
|
Publication #:
|
|
Pub Dt:
|
07/05/2012
| | | | |
Title:
|
METHODS AND SYSTEMS FOR IN-SITU PYROMETER CALIBRATION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/01/2019
|
Application #:
|
13333152
|
Filing Dt:
|
12/21/2011
|
Publication #:
|
|
Pub Dt:
|
07/05/2012
| | | | |
Title:
|
WAFER PROCESSING WITH CARRIER EXTENSION
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2014
|
Application #:
|
13354300
|
Filing Dt:
|
01/19/2012
|
Title:
|
APPARATUS AND METHOD FOR IMPROVING THE INTENSITY PROFILE OF A BEAM IMAGE USED TO PROCESS A SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/01/2013
|
Application #:
|
13359936
|
Filing Dt:
|
01/27/2012
|
Publication #:
|
|
Pub Dt:
|
08/01/2013
| | | | |
Title:
|
TWO-BEAM LASER ANNEALING WITH IMPROVED TEMPERATURE PERFORMANCE
|
|
|
Patent #:
|
|
Issue Dt:
|
04/02/2013
|
Application #:
|
13366199
|
Filing Dt:
|
02/03/2012
|
Title:
|
SUBSTRATE-ALIGNMENT USING DETECTOR OF SUBSTRATE MATERIAL
|
|
|
Patent #:
|
|
Issue Dt:
|
11/14/2017
|
Application #:
|
13424821
|
Filing Dt:
|
03/20/2012
|
Publication #:
|
|
Pub Dt:
|
09/26/2013
| | | | |
Title:
|
KEYED WAFER CARRIER
|
|
|
Patent #:
|
|
Issue Dt:
|
09/16/2014
|
Application #:
|
13448282
|
Filing Dt:
|
04/16/2012
|
Publication #:
|
|
Pub Dt:
|
08/23/2012
| | | | |
Title:
|
ION SOURCES AND METHODS FOR GENERATING AN ION BEAM WITH CONTROLLABLE ION CURRENT DENSITY DISTRIBUTION
|
|
|
Patent #:
|
|
Issue Dt:
|
06/11/2019
|
Application #:
|
13450062
|
Filing Dt:
|
04/18/2012
|
Publication #:
|
|
Pub Dt:
|
10/24/2013
| | | | |
Title:
|
WAFTER CARRIER FOR CHEMICAL VAPOR DEPOSITION SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/17/2015
|
Application #:
|
13483491
|
Filing Dt:
|
05/30/2012
|
Publication #:
|
|
Pub Dt:
|
12/06/2012
| | | | |
Title:
|
HEATED WAFER CARRIER PROFILING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/20/2016
|
Application #:
|
13531162
|
Filing Dt:
|
06/22/2012
|
Publication #:
|
|
Pub Dt:
|
12/26/2013
| | | | |
Title:
|
RADIATION THERMOMETER USING OFF-FOCUS TELECENTRIC OPTICS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/21/2015
|
Application #:
|
13531220
|
Filing Dt:
|
06/22/2012
|
Publication #:
|
|
Pub Dt:
|
12/26/2013
| | | | |
Title:
|
CONTROL OF STRAY RADIATION IN A CVD CHAMBER
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/2016
|
Application #:
|
13550270
|
Filing Dt:
|
07/16/2012
|
Publication #:
|
|
Pub Dt:
|
01/16/2014
| | | | |
Title:
|
Film Deposition Assisted by Angular Selective Etch on a Surface
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2018
|
Application #:
|
13568928
|
Filing Dt:
|
08/07/2012
|
Publication #:
|
|
Pub Dt:
|
02/13/2014
| | | | |
Title:
|
TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/2014
|
Application #:
|
13588750
|
Filing Dt:
|
08/17/2012
|
Publication #:
|
|
Pub Dt:
|
02/20/2014
| | | | |
Title:
|
LED-based photolithographic illuminator with high collection efficiency
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/2015
|
Application #:
|
13690132
|
Filing Dt:
|
11/30/2012
|
Publication #:
|
|
Pub Dt:
|
06/05/2014
| | | | |
Title:
|
Movable microchamber system with gas curtain
|
|
|
Patent #:
|
|
Issue Dt:
|
10/31/2017
|
Application #:
|
13705650
|
Filing Dt:
|
12/05/2012
|
Publication #:
|
|
Pub Dt:
|
03/06/2014
| | | | |
Title:
|
APPARATUS AND METHOD FOR IMPROVED ACOUSTICAL TRANSFORMATION
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2014
|
Application #:
|
13706397
|
Filing Dt:
|
12/06/2012
|
Title:
|
DUAL-LOOP CONTROL FOR LASER ANNEALING OF SEMICONDUCTOR WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/2014
|
Application #:
|
13708371
|
Filing Dt:
|
12/07/2012
|
Publication #:
|
|
Pub Dt:
|
05/16/2013
| | | | |
Title:
|
ELECTRICAL CONTACTS FOR USE WITH VACUUM DEPOSITION SOURCES
|
|
|
Patent #:
|
|
Issue Dt:
|
07/12/2016
|
Application #:
|
13736439
|
Filing Dt:
|
01/08/2013
|
Publication #:
|
|
Pub Dt:
|
07/10/2014
| | | | |
Title:
|
SELF-CLEANING SHUTTER FOR CVD REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
07/04/2017
|
Application #:
|
13780657
|
Filing Dt:
|
02/28/2013
|
Publication #:
|
|
Pub Dt:
|
08/28/2014
| | | | |
Title:
|
SYSTEM AND METHOD FOR PERFORMING A WET ETCHING PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/01/2015
|
Application #:
|
13801357
|
Filing Dt:
|
03/13/2013
|
Publication #:
|
|
Pub Dt:
|
12/26/2013
| | | | |
Title:
|
TEMPERATURE CONTROL FOR GaN BASED MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/01/2019
|
Application #:
|
13840164
|
Filing Dt:
|
03/15/2013
|
Publication #:
|
|
Pub Dt:
|
09/18/2014
| | | | |
Title:
|
WAFER CARRIER HAVING PROVISIONS FOR IMPROVING HEATING UNIFORMITY IN CHEMICAL VAPOR DEPOSITION SYSTEMS
|
|