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Reel/Frame:058652/0145   Pages: 5
Recorded: 01/13/2022
Attorney Dkt #:106517-000110US-1294777
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/16/2023
Application #:
17575463
Filing Dt:
01/13/2022
Publication #:
Pub Dt:
05/05/2022
Title:
SUBSTRATE WITH A MULTILAYER REFLECTIVE FILM, REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Assignors
1
Exec Dt:
03/19/2020
2
Exec Dt:
03/19/2020
Assignee
1
6-10-1 NISHI-SHINJUKU, SHINJUKU-KU
TOKYO, JAPAN 160-8347
Correspondence name and address
KILPATRICK TOWNSEND & STOCKTON LLP
1100 PEACHTREE STREET
SUITE 2800
ATLANTA, GA 30309

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