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Total properties:
21
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Patent #:
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Issue Dt:
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09/02/2008
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Application #:
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10538064
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Filing Dt:
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03/07/2006
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Publication #:
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Pub Dt:
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09/28/2006
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Title:
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METHOD AND DEVICE FOR PLASMA-ETCHING ORGANIC MATERIAL FILM
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10694890
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Filing Dt:
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10/29/2003
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Publication #:
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Pub Dt:
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07/08/2004
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Title:
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AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING, CHEMICAL MECHANICAL POLISHING PROCESS, PRODUCTION PROCESS OF SEMICONDUCTOR DEVICE AND MATERIAL FOR PREPARING AN AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10821971
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Filing Dt:
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04/12/2004
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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VACUUM PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
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Patent #:
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Issue Dt:
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05/06/2008
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Application #:
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10854142
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Filing Dt:
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05/27/2004
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Publication #:
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Pub Dt:
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01/20/2005
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10882362
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Filing Dt:
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07/02/2004
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Publication #:
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Pub Dt:
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02/17/2005
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Title:
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CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION AND CHEMICAL MECHANICAL POLISHING METHOD
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Patent #:
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Issue Dt:
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02/12/2008
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Application #:
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10896968
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Filing Dt:
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07/23/2004
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Publication #:
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Pub Dt:
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01/27/2005
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Title:
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METHOD OF SELECTING PHOTOMASK BLANK SUBSTRATES
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Patent #:
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Issue Dt:
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04/01/2008
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Application #:
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10896970
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Filing Dt:
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07/23/2004
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Publication #:
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Pub Dt:
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01/27/2005
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Title:
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PHOTOMASK BLANK SUBSTRATE, PHOTOMASK BLANK AND PHOTOMASK
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Patent #:
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Issue Dt:
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10/23/2007
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Application #:
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10956365
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Filing Dt:
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10/04/2004
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Publication #:
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Pub Dt:
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04/21/2005
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Title:
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ETCHING METHOD
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Patent #:
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Issue Dt:
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02/06/2007
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Application #:
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11038479
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Filing Dt:
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01/21/2005
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Publication #:
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Pub Dt:
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09/22/2005
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Title:
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PEELING DEVICE AND PEELING METHOD
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Patent #:
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Issue Dt:
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04/10/2007
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Application #:
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11259147
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Filing Dt:
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10/27/2005
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Publication #:
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Pub Dt:
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02/16/2006
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Title:
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VACUUM PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
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|
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Patent #:
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|
Issue Dt:
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09/02/2014
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Application #:
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12363070
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Filing Dt:
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01/30/2009
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Publication #:
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Pub Dt:
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08/06/2009
| | | | |
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Title:
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SUBSTRATE PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Patent #:
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Issue Dt:
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02/21/2012
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Application #:
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12477332
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Filing Dt:
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06/03/2009
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Publication #:
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Pub Dt:
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09/24/2009
| | | | |
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Title:
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CHEMICAL MECHANICAL POLISHING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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07/23/2013
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Application #:
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12537766
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Filing Dt:
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08/07/2009
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Publication #:
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Pub Dt:
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03/25/2010
| | | | |
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Title:
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CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION AND CHEMICAL MECHANICAL POLISHING METHOD
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|
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Patent #:
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Issue Dt:
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09/23/2014
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Application #:
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12578007
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Filing Dt:
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10/13/2009
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Publication #:
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Pub Dt:
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02/04/2010
| | | | |
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Title:
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PLASMA ETCHING UNIT
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Patent #:
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Issue Dt:
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09/04/2012
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Application #:
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12794028
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Filing Dt:
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06/04/2010
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Publication #:
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Pub Dt:
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12/09/2010
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Title:
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SURFACE TREATMENT COMPOSITION, SURFACE TREATMENT METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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11/03/2015
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Application #:
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13178759
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Filing Dt:
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07/08/2011
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Publication #:
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Pub Dt:
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01/12/2012
| | | | |
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Title:
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PLASMA PROCESSING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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02/12/2013
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Application #:
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13369970
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Filing Dt:
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02/09/2012
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Publication #:
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Pub Dt:
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10/04/2012
| | | | |
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Title:
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SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
|
07/08/2014
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Application #:
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13420870
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Filing Dt:
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03/15/2012
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Publication #:
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Pub Dt:
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01/24/2013
| | | | |
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Title:
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SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCRITICAL DRYING APPARATUS
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|
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Patent #:
|
|
Issue Dt:
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02/05/2019
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Application #:
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13482318
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Filing Dt:
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05/29/2012
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
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Title:
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SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/09/2018
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Application #:
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13941836
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Filing Dt:
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07/15/2013
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Publication #:
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Pub Dt:
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01/23/2014
| | | | |
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Title:
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SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
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|
|
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Patent #:
|
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Issue Dt:
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11/03/2015
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Application #:
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14222762
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Filing Dt:
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03/24/2014
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Publication #:
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Pub Dt:
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07/24/2014
| | | | |
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Title:
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DEPOSIT REMOVAL METHOD
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