Patent Assignment Details
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| Reel/Frame: | 059454/0697 | |
| Pages: | 3 |
| | Recorded: | 03/21/2022 | | |
| Attorney Dkt #: | PJK4685352 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17762278
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Filing Dt:
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03/21/2022
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Publication #:
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Pub Dt:
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01/26/2023
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Title:
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METHOD AND SYSTEM FOR REMOVING L-FC IN PLASMA ETCHING PROCESS
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Assignee
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| (YONGUNDONG, DAEJEON UNIVERSITY) 62, DAEHAK-RO DONG-GU |
| DAEJEON, KOREA, REPUBLIC OF 34520 |
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Correspondence name and address
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NOVICK, KIM & LEE, PLLC
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3251 OLD LEE HIGHWAY, SUITE 500
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FAIRFAX, VA 22030
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05/12/2024 04:28 PM
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