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Reel/Frame:061245/0468   Pages: 7
Recorded: 09/28/2022
Attorney Dkt #:HITACHI12-0001100US03
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
17954954
Filing Dt:
09/28/2022
Publication #:
Pub Dt:
01/19/2023
Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Assignors
1
Exec Dt:
06/13/2017
2
Exec Dt:
06/13/2017
3
Exec Dt:
06/13/2017
4
Exec Dt:
06/13/2017
Assignee
1
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU
TOKYO, JAPAN 105-8039
Correspondence name and address
VOLPE KOENIG
30 SOUTH 17TH STREET, 18TH FLOOR
PHILADELPHIA, PA 19103

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