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Reel/Frame:061707/0716   Pages: 8
Recorded: 11/09/2022
Attorney Dkt #:39268U-TP
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
17979338
Filing Dt:
11/02/2022
Publication #:
Pub Dt:
05/18/2023
Title:
CONTROL PARAMETER SETTING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM
Assignors
1
Exec Dt:
10/27/2022
2
Exec Dt:
10/27/2022
3
Exec Dt:
10/27/2022
Assignee
1
3-1 AKASAKA 5-CHOME
MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
NATH, GOLDBERG & MEYER
112 S WEST ST
ALEXANDRIA, VA 22314

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