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Reel/Frame:062147/0917   Pages: 3
Recorded: 12/19/2022
Attorney Dkt #:LAM1P692/10066-2US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
18009238
Filing Dt:
12/08/2022
Publication #:
Pub Dt:
07/06/2023
Title:
SEALING SURFACES OF COMPONENTS USED IN PLASMA ETCHING TOOLS USING ATOMIC LAYER DEPOSITION
Assignors
1
Exec Dt:
07/14/2020
2
Exec Dt:
07/08/2020
3
Exec Dt:
07/15/2020
Assignee
1
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondence name and address
BEYER LAW GROUP LLP
P.O. BOX 51887
PALO ALTO, CA 94303

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