Patent Assignment Details
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| Reel/Frame: | 062604/0515 | |
| Pages: | 5 |
| | Recorded: | 02/06/2023 | | |
| Attorney Dkt #: | 38404UY |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18104522
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Filing Dt:
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02/01/2023
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Publication #:
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Pub Dt:
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06/08/2023
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Title:
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METHOD OF CLEANING STAGE IN PLASMA PROCESSING APPARATUS, AND THE PLASMA PROCESSING APPARATUS
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 1076325 |
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Correspondence name and address
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NATH, GOLDBERG & MEYER
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112 S. WEST ST.
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38404UY_JLM/ALS
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ALEXANDRIA, VA 22314
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