Patent Assignment Details
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| Reel/Frame: | 062941/0559 | |
| Pages: | 17 |
| | Recorded: | 03/10/2023 | | |
| Attorney Dkt #: | 1022.0167C |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18180615
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Filing Dt:
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03/08/2023
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Publication #:
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Pub Dt:
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07/13/2023
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Title:
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TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 3-4, KANDAKAJI-CHO, CHIYODA-KU |
| TOKYO, JAPAN 1010045 |
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Correspondence name and address
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EDELL, SHAPIRO & FINNAN, LLC
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9801 WASHINGTONIAN BOULEVARD
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SUITE 750
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GAITHERSBURG, MD 20878
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