Patent Assignment Details
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| Reel/Frame: | 063517/0746 | |
| Pages: | 5 |
| | Recorded: | 05/03/2023 | | |
| Attorney Dkt #: | 32602UA |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18142066
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Filing Dt:
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05/02/2023
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Publication #:
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Pub Dt:
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08/24/2023
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Title:
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ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA, INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND METHOD THEREFOR
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINTO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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NATH, GOLDBERG & MEYER
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112 S WEST STREET
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32602UA_JLM_HJ
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ALEXANDRIA, VA 22314
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