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Reel/Frame:	063857/0199			Pages:	13
		Recorded:	06/02/2023
Attorney Dkt #:	2022219 PAT
Conveyance:	SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 79

Patent #:	11384879	Issue Dt:	07/12/2022	Application #:	16099133	Filing Dt:	11/05/2018
Publication #:	US20190145560	Pub Dt:	05/16/2019
Title:	FLUID CIRCUIT WITH INTEGRATED ELECTROSTATIC DISCHARGE MITIGATION

Patent #:	11618016	Issue Dt:	04/04/2023	Application #:	17503986	Filing Dt:	10/18/2021
Publication #:	US20220032282	Pub Dt:	02/03/2022
Title:	GRAFTED POLYSULFONE MEMBRANES

Patent #:	NONE	Issue Dt:		Application #:	17550740	Filing Dt:	12/14/2021
Publication #:	US20220194804	Pub Dt:	06/23/2022
Title:	GAS STORAGE SYSTEMS AND METHOD THEREOF

Patent #:	NONE	Issue Dt:		Application #:	17558381	Filing Dt:	12/21/2021
Publication #:	US20220208592	Pub Dt:	06/30/2022
Title:	ELECTROSTATIC CHUCK PREPARED BY ADDITIVE MANUFACTURING, AND RELATED METHODS AND STRUCTURES

Patent #:	NONE	Issue Dt:		Application #:	17559906	Filing Dt:	12/22/2021
Publication #:	US20220208553	Pub Dt:	06/30/2022
Title:	SELECTIVE REMOVAL OF METAL OXIDE HARD MASKS

Patent #:	NONE	Issue Dt:		Application #:	17564842	Filing Dt:	12/29/2021
Publication #:	US20220208582	Pub Dt:	06/30/2022
Title:	REMOTE OPTIMIZATION OF PURGE FLOW RATES IN A CONTAINER

Patent #:	NONE	Issue Dt:		Application #:	17579487	Filing Dt:	01/19/2022
Publication #:	US20220238330	Pub Dt:	07/28/2022
Title:	HIGH THROUGHPUT DEPOSITION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	17584379	Filing Dt:	01/25/2022
Publication #:	US20220234105	Pub Dt:	07/28/2022
Title:	METAL-ORGANIC-FRAMEWORK-CONTAINING BODIES AND RELATED METHODS

Patent #:	11697660	Issue Dt:	07/11/2023	Application #:	17585971	Filing Dt:	01/27/2022
Publication #:	US20220242888	Pub Dt:	08/04/2022
Title:	PROCESS FOR PREPARING ORGANOTIN COMPOUNDS

Patent #:	11685752	Issue Dt:	06/27/2023	Application #:	17586834	Filing Dt:	01/28/2022
Publication #:	US20220242889	Pub Dt:	08/04/2022
Title:	PROCESS FOR PREPARING ORGANOTIN COMPOUNDS

Patent #:	NONE	Issue Dt:		Application #:	17681186	Filing Dt:	02/25/2022
Publication #:	US20220275506	Pub Dt:	09/01/2022
Title:	SOLIDS VAPORIZER

Patent #:	NONE	Issue Dt:		Application #:	17689610	Filing Dt:	03/08/2022
Publication #:	US20220290812	Pub Dt:	09/15/2022
Title:	GAS STORAGE AND DISPENSING CONTAINER AND A METHOD OF DISPENSING THEREFROM

Patent #:	NONE	Issue Dt:		Application #:	17690388	Filing Dt:	03/09/2022
Publication #:	US20220293446	Pub Dt:	09/15/2022
Title:	SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH FRONT AND REAR OPENINGS

Patent #:	11866229	Issue Dt:	01/09/2024	Application #:	17695284	Filing Dt:	03/15/2022
Publication #:	US20220204218	Pub Dt:	06/30/2022
Title:	AUTOMATABLE CLOSURE

Patent #:	NONE	Issue Dt:		Application #:	17696101	Filing Dt:	03/16/2022
Publication #:	US20220298639	Pub Dt:	09/22/2022
Title:	SUBSTRATE WITH FLUORINATED YTTRIUM COATINGS, AND METHODS OF PREPARING AND USING THE SUBSTRATES

Patent #:	NONE	Issue Dt:		Application #:	17698104	Filing Dt:	03/18/2022
Publication #:	US20220298462	Pub Dt:	09/22/2022
Title:	BAG HOLDER FOR PLATE FREEZING

Patent #:	NONE	Issue Dt:		Application #:	17698207	Filing Dt:	03/18/2022
Publication #:	US20220295784	Pub Dt:	09/22/2022
Title:	BAG HOLDER FOR BLAST FREEZING

Patent #:	11746912	Issue Dt:	09/05/2023	Application #:	17701093	Filing Dt:	03/22/2022
Publication #:	US20220213968	Pub Dt:	07/07/2022
Title:	WELDED CHECK VALVE

Patent #:	NONE	Issue Dt:		Application #:	17702889	Filing Dt:	03/24/2022
Publication #:	US20220306902	Pub Dt:	09/29/2022
Title:	SUSPENSION FOR CHEMICAL MECHANICAL PLANARIZATION (CMP) AND METHOD EMPLOYING THE SAME

Patent #:	NONE	Issue Dt:		Application #:	17707756	Filing Dt:	03/29/2022
Publication #:	US20220323912	Pub Dt:	10/13/2022
Title:	LIQUID PURIFICATION MEMBRANE INCLUDING CARBONACEOUS MATERIALS AND METHODS OF FORMING THEM

Patent #:	NONE	Issue Dt:		Application #:	17708054	Filing Dt:	03/30/2022
Publication #:	US20220315802	Pub Dt:	10/06/2022
Title:	SUSPENSION FOR CHEMICAL MECHANICAL PLANARIZATION (CMP) AND METHOD EMPLOYING THE SAME

Patent #:	NONE	Issue Dt:		Application #:	17708999	Filing Dt:	03/30/2022
Publication #:	US20220316055	Pub Dt:	10/06/2022
Title:	LOW TEMPERATURE DEPOSITION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	17720580	Filing Dt:	04/14/2022
Publication #:	US20220336210	Pub Dt:	10/20/2022
Title:	CLEANING COMPOSITION

Patent #:	NONE	Issue Dt:		Application #:	17724992	Filing Dt:	04/20/2022
Publication #:	US20220340430	Pub Dt:	10/27/2022
Title:	METHOD FOR PURIFYING IODOSILANES

Patent #:	NONE	Issue Dt:		Application #:	17725473	Filing Dt:	04/20/2022
Publication #:	US20220340185	Pub Dt:	10/27/2022
Title:	LIFT WHEEL LOCK FOR INSTALLING AND/OR REMOVING VAPORIZER VESSELS

Patent #:	NONE	Issue Dt:		Application #:	17726079	Filing Dt:	04/21/2022
Publication #:	US20220359192	Pub Dt:	11/10/2022
Title:	SILICON PRECURSOR COMPOUNDS AND METHOD FOR FORMING SILICON-CONTAINING FILMS

Patent #:	NONE	Issue Dt:		Application #:	17727133	Filing Dt:	04/22/2022
Publication #:	US20220350242	Pub Dt:	11/03/2022
Title:	HIGH QUANTUM EFFICIENCY DRY RESIST FOR LOW EXPOSURE DOSE OF EUV RADIATION

Patent #:	NONE	Issue Dt:		Application #:	17727668	Filing Dt:	04/22/2022
Publication #:	US20220356085	Pub Dt:	11/10/2022
Title:	FLUID CIRCUIT WITH INTEGRATED ELECTROSTATIC DISCHARGE MITIGATION

Patent #:	NONE	Issue Dt:		Application #:	17732136	Filing Dt:	04/28/2022
Publication #:	US20220349488	Pub Dt:	11/03/2022
Title:	ELECTROSTATIC DISCHARGE MITIGATION VALVE

Patent #:	NONE	Issue Dt:		Application #:	17732446	Filing Dt:	04/28/2022
Publication #:	US20220349528	Pub Dt:	11/03/2022
Title:	VESSELS AND METHODS FOR STORING AND DELIVERY A REAGENT

Patent #:	NONE	Issue Dt:		Application #:	17732472	Filing Dt:	04/28/2022
Publication #:	US20220347631	Pub Dt:	11/03/2022
Title:	FILTER CARTRIDGE, APPARATUS, AND METHODS

Patent #:	11807653	Issue Dt:	11/07/2023	Application #:	17736855	Filing Dt:	05/04/2022
Publication #:	US20220259236	Pub Dt:	08/18/2022
Title:	GROUP VI PRECURSOR COMPOUNDS

Patent #:	NONE	Issue Dt:		Application #:	17737627	Filing Dt:	05/05/2022
Publication #:	US20220357242	Pub Dt:	11/10/2022
Title:	MULTISTAGE GAS SAMPLING TRAP AND DETECTION OF SULFUROUS SPECIES CONTAMINANT

Patent #:	11932935	Issue Dt:	03/19/2024	Application #:	17738352	Filing Dt:	05/06/2022
Publication #:	US20220356563	Pub Dt:	11/10/2022
Title:	DEPOSITION PROCESS FOR MOLYBDENUM OR TUNGSTEN MATERIALS

Patent #:	NONE	Issue Dt:		Application #:	17738518	Filing Dt:	05/06/2022
Publication #:	US20220362720	Pub Dt:	11/17/2022
Title:	POROUS POLY (CYCLIC OLEFIN) MEMBRANES

Patent #:	NONE	Issue Dt:		Application #:	17743080	Filing Dt:	05/12/2022
Publication #:	US20220363990	Pub Dt:	11/17/2022
Title:	SELECTIVE ETCHANT COMPOSITIONS AND METHODS

Patent #:	NONE	Issue Dt:	05/21/2024	Application #:	17744240	Filing Dt:	05/13/2022
Publication #:	US20220267895	Pub Dt:	08/25/2022
Title:	CHEMICAL VAPOR DEPOSITION PROCESSES USING RUTHENIUM PRECURSOR AND REDUCING GAS

Patent #:	11781066	Issue Dt:	10/10/2023	Application #:	17747731	Filing Dt:	05/18/2022
Publication #:	US20220275276	Pub Dt:	09/01/2022
Title:	WET ETCHING COMPOSITION AND METHOD

Patent #:	NONE	Issue Dt:		Application #:	17749868	Filing Dt:	05/20/2022
Publication #:	US20220389314	Pub Dt:	12/08/2022
Title:	COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS

Patent #:	NONE	Issue Dt:		Application #:	17827243	Filing Dt:	05/27/2022
Publication #:	US20220384227	Pub Dt:	12/01/2022
Title:	SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH INCREASED DIAMETER PURGE PORTS

Patent #:	11815211	Issue Dt:	11/14/2023	Application #:	17827423	Filing Dt:	05/27/2022
Publication #:	US20220381384	Pub Dt:	12/01/2022
Title:	ASEPTIC COUPLING ASSEMBLY AND METHOD OF ASEPTIC COUPLING

Patent #:	11746413	Issue Dt:	09/05/2023	Application #:	17829007	Filing Dt:	05/31/2022
Publication #:	US20220298629	Pub Dt:	09/22/2022
Title:	CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIVERY SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	17833024	Filing Dt:	06/06/2022
Publication #:	US20220387911	Pub Dt:	12/08/2022
Title:	FILTER CARTRIDGE, AND METHOD OF RETROFITTING FILTER HOUSING

Patent #:	NONE	Issue Dt:		Application #:	17835716	Filing Dt:	06/08/2022
Publication #:	US20220388751	Pub Dt:	12/08/2022
Title:	WAFER CONTAINER AND PURGE SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	17837710	Filing Dt:	06/10/2022
Publication #:	US20220410061	Pub Dt:	12/29/2022
Title:	GAS-PROCESSING SYSTEMS AND METHODS

Patent #:	NONE	Issue Dt:		Application #:	17838024	Filing Dt:	06/10/2022
Publication #:	US20220307634	Pub Dt:	09/29/2022
Title:	FLUID CIRCUIT WITH INTEGRATED ELECTROSTATIC DISCHARGE MITIGATION

Patent #:	NONE	Issue Dt:		Application #:	17839208	Filing Dt:	06/13/2022
Publication #:	US20220406637	Pub Dt:	12/22/2022
Title:	SUBSTRATE CONTAINER WITH DOOR GASKET

Patent #:	11713504	Issue Dt:	08/01/2023	Application #:	17840367	Filing Dt:	06/14/2022
Publication #:	US20220316056	Pub Dt:	10/06/2022
Title:	CHEMICAL RESISTANT MULTI-LAYER COATINGS APPLIED BY ATOMIC LAYER DEPOSITION

Patent #:	NONE	Issue Dt:		Application #:	17840394	Filing Dt:	06/14/2022
Publication #:	US20220401893	Pub Dt:	12/22/2022
Title:	POLY(QUINOLINE) MEMBRANES

Patent #:	NONE	Issue Dt:		Application #:	17840448	Filing Dt:	06/14/2022
Publication #:	US20220396715	Pub Dt:	12/15/2022
Title:	GRINDING OF HARD SUBSTRATES

Patent #:	NONE	Issue Dt:		Application #:	17842109	Filing Dt:	06/16/2022
Publication #:	US20220404696	Pub Dt:	12/22/2022
Title:	BONDED LAYER ON EXTREME ULTRAVIOLET PLATE

Patent #:	NONE	Issue Dt:		Application #:	17843021	Filing Dt:	06/17/2022
Publication #:	US20220402945	Pub Dt:	12/22/2022
Title:	PROCESS FOR PREPARING ORGANOTIN COMPOUNDS

Patent #:	NONE	Issue Dt:		Application #:	17846929	Filing Dt:	06/22/2022
Publication #:	US20230002641	Pub Dt:	01/05/2023
Title:	POLISHING OF TRANSITION METALS

Patent #:	NONE	Issue Dt:		Application #:	17846936	Filing Dt:	06/22/2022
Publication #:	US20220410079	Pub Dt:	12/29/2022
Title:	SINTERED POROUS BODY WITH MULTIPLE LAYERS

Patent #:	NONE	Issue Dt:		Application #:	17847077	Filing Dt:	06/22/2022
Publication #:	US20230025277	Pub Dt:	01/26/2023
Title:	OLEOPHOBIC FLUOROPOLYMERS AND FIBROUS MATERIALS PREPARED THEREFROM

Patent #:	NONE	Issue Dt:		Application #:	17847088	Filing Dt:	06/22/2022
Publication #:	US20230026572	Pub Dt:	01/26/2023
Title:	OLEOPHOBIC FLUOROPOLYMERS AND FILTER MATERIALS PREPARED THEREFROM

Patent #:	NONE	Issue Dt:		Application #:	17854473	Filing Dt:	06/30/2022
Publication #:	US20220364225	Pub Dt:	11/17/2022
Title:	METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS

Patent #:	NONE	Issue Dt:		Application #:	17855603	Filing Dt:	06/30/2022
Publication #:	US20220333012	Pub Dt:	10/20/2022
Title:	FORMULATIONS FOR HIGH SELECTIVE SILICON NITRIDE ETCH

Patent #:	NONE	Issue Dt:		Application #:	17859953	Filing Dt:	07/07/2022
Publication #:	US20230080718	Pub Dt:	03/16/2023
Title:	SILICON PRECURSOR MATERIALS, SILICON-CONTAINING FILMS, AND RELATED METHODS

Patent #:	11772127	Issue Dt:	10/03/2023	Application #:	17867530	Filing Dt:	07/18/2022
Publication #:	US20230042148	Pub Dt:	02/09/2023
Title:	METHODS FOR APPLYING A BLANKET POLYMER COATING TO A SUBSTRATE

Patent #:	NONE	Issue Dt:		Application #:	17871249	Filing Dt:	07/22/2022
Publication #:	US20230030188	Pub Dt:	02/02/2023
Title:	ADSORBENTS AND METHODS FOR REDUCING CONTAMINATION IN WAFER CONTAINER MICROENVIRONMENTS

Patent #:	NONE	Issue Dt:		Application #:	17871579	Filing Dt:	07/22/2022
Publication #:	US20230023196	Pub Dt:	01/26/2023
Title:	BAG HOLDER FOR FREEZING, THAWING, AND SHIPPING

Patent #:	NONE	Issue Dt:		Application #:	17882199	Filing Dt:	08/05/2022
Publication #:	US20220372631	Pub Dt:	11/24/2022
Title:	METHOD FOR SELECTIVELY REMOVING NICKEL PLATINUM MATERIAL

Patent #:	NONE	Issue Dt:		Application #:	17888305	Filing Dt:	08/15/2022
Publication #:	US20220395865	Pub Dt:	12/15/2022
Title:	COMPOSITIONS AND METHODS FOR REDUCING INTERACTION BETWEEN ABRASIVE PARTICLES AND A CLEANING BRUSH

Patent #:	NONE	Issue Dt:		Application #:	17893658	Filing Dt:	08/23/2022
Publication #:	US20230062413	Pub Dt:	03/02/2023
Title:	RIGID FRAME BAGS

Patent #:	NONE	Issue Dt:		Application #:	17894905	Filing Dt:	08/24/2022
Publication #:	US20230064103	Pub Dt:	03/02/2023
Title:	APPARATUS AND METHODS FOR CLEAN TRANSFER OF CENTRIFUGED MATERIALS

Patent #:	NONE	Issue Dt:		Application #:	17895967	Filing Dt:	08/25/2022
Publication #:	US20230070776	Pub Dt:	03/09/2023
Title:	CMP COMPOSITION INCLUDING AN ANIONIC ABRASIVE

Patent #:	NONE	Issue Dt:		Application #:	17896964	Filing Dt:	08/26/2022
Publication #:	US20230068384	Pub Dt:	03/02/2023
Title:	PRECURSOR DELIVERY SYSTEMS, PRECURSOR SUPPLY PACKAGES, AND RELATED METHODS

Patent #:	NONE	Issue Dt:		Application #:	17898179	Filing Dt:	08/29/2022
Publication #:	US20230060192	Pub Dt:	03/02/2023
Title:	METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK

Patent #:	NONE	Issue Dt:		Application #:	17900693	Filing Dt:	08/31/2022
Publication #:	US20220410084	Pub Dt:	12/29/2022
Title:	LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS

Patent #:	NONE	Issue Dt:		Application #:	17900713	Filing Dt:	08/31/2022
Publication #:	US20230062455	Pub Dt:	03/02/2023
Title:	VAPORIZER ASSEMBLY

Patent #:	NONE	Issue Dt:		Application #:	17901569	Filing Dt:	09/01/2022
Publication #:	US20230041086	Pub Dt:	02/09/2023
Title:	VAPOR DEPOSITION PRECURSOR COMPOUNDS AND PROCESS OF USE

Patent #:	NONE	Issue Dt:		Application #:	17902210	Filing Dt:	09/02/2022
Publication #:	US20230076804	Pub Dt:	03/09/2023
Title:	TEXTURED CMP PAD COMPRISING POLYMER PARTICLES

Patent #:	NONE	Issue Dt:		Application #:	17940517	Filing Dt:	09/08/2022
Publication #:	US20230075744	Pub Dt:	03/09/2023
Title:	RETICLE POD HAVING LATCH INCLUDING RAMPED SURFACE

Patent #:	NONE	Issue Dt:		Application #:	17944904	Filing Dt:	09/14/2022
Publication #:	US20230084930	Pub Dt:	03/16/2023
Title:	ELECTROSTATIC CHUCK AND RELATED METHODS AND STRUCTURES

Patent #:	NONE	Issue Dt:		Application #:	17945594	Filing Dt:	09/15/2022
Publication #:	US20230079446	Pub Dt:	03/16/2023
Title:	COMPOSITE ADSORBENT-CONTAINING BODIES AND RELATED METHODS

Patent #:	NONE	Issue Dt:		Application #:	17945849	Filing Dt:	09/15/2022
Publication #:	US20230080027	Pub Dt:	03/16/2023
Title:	STORAGE AND DELIVERY VESSELS AND RELATED METHODS

Patent #:	NONE	Issue Dt:		Application #:	17949956	Filing Dt:	09/21/2022
Publication #:	US20230030323	Pub Dt:	02/02/2023
Title:	METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM

Patent #:	NONE	Issue Dt:		Application #:	17972509	Filing Dt:	10/24/2022
Publication #:	US20230059396	Pub Dt:	02/23/2023
Title:	COMPOSITION AND METHOD FOR COBALT CMP

Assignors

ENTEGRIS, INC.

Exec Dt:

06/01/2023

CMC MATERIALS LLC

Exec Dt:

06/01/2023

Assignee

MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT

1300 THAMES STREET, 4TH FLOOR

BALTIMORE, MARYLAND 21231

Correspondence name and address
	STEWART WALSH
	1025 CONNECTICUT AVE NW, SUITE 712
	COGENCY GLOBAL INC.
	WASHINGTON, DC 20036

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