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Patent Assignment Details
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Reel/Frame:064181/0692   Pages: 7
Recorded: 07/07/2023
Attorney Dkt #:1015-0260
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
18259151
Filing Dt:
06/23/2023
Publication #:
Pub Dt:
02/15/2024
Title:
METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING FILM, AND SILICON NITRIDE FILM
Assignors
1
Exec Dt:
06/22/2023
2
Exec Dt:
06/15/2023
3
Exec Dt:
06/15/2023
Assignee
1
2500, HAGISONO, CHIGASAKI-SHI
KANAGAWA, JAPAN 253-8543
Correspondence name and address
TOMOKO NAKAJIMA
2000 DUKE STREET
SUITE 300
ALEXANDRIA, VA 22314

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