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Reel/Frame:066183/0833   Pages: 6
Recorded: 01/19/2024
Attorney Dkt #:1022.0110CON
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/27/2024
Application #:
17744380
Filing Dt:
05/13/2022
Publication #:
Pub Dt:
09/01/2022
Title:
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
Assignors
1
Exec Dt:
12/24/2019
2
Exec Dt:
01/17/2020
3
Exec Dt:
12/24/2019
4
Exec Dt:
12/24/2019
Assignee
1
3-4, KANDAKAJI-CHO, CHIYODA-KU
TOKYO, JAPAN 1010045
Correspondence name and address
EDELL, SHAPIRO & FINNAN, LLC
9801 WASHINGTONIAN BOULEVARD
SUITE 750
GAITHERSBURG, MD 20878

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