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Patent Assignment Details
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Reel/Frame:049168/0064   Pages: 19
Recorded: 05/14/2019
Attorney Dkt #:1022.0076C
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/10/2020
Application #:
15456284
Filing Dt:
03/10/2017
Publication #:
Pub Dt:
09/14/2017
Title:
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Assignor
1
Exec Dt:
06/01/2018
Assignee
1
3-4, KANDAKAJI-CHO
CHIYODA-KU
TOKYO, JAPAN 1010045
Correspondence name and address
EDELL SHAPIRO & FINNAN LLC
9801 WASHINGTONIAN BLVD.
SUITE 750
GAITHERSBURG, MD 20878

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