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618
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Patent #:
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Issue Dt:
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01/16/2018
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Application #:
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15095898
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Filing Dt:
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04/11/2016
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Publication #:
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Pub Dt:
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10/13/2016
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Title:
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RECIRCULATION SUBSTRATE CONTAINER PURGING SYSTEMS
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Patent #:
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Issue Dt:
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09/15/2020
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Application #:
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15103268
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Filing Dt:
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06/09/2016
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Publication #:
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Pub Dt:
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10/06/2016
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Title:
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PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/15/2022
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Application #:
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15110130
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Filing Dt:
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07/07/2016
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Publication #:
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Pub Dt:
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11/10/2016
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/12/2017
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Application #:
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15114275
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Filing Dt:
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07/26/2016
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Publication #:
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Pub Dt:
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02/09/2017
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/17/2019
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Application #:
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15137722
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Filing Dt:
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04/25/2016
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Publication #:
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Pub Dt:
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10/27/2016
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Title:
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WORKPIECE HANDLING MODULES
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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15209497
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Filing Dt:
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07/13/2016
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Publication #:
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Pub Dt:
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01/19/2017
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Title:
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ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15215143
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Filing Dt:
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07/20/2016
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Publication #:
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Pub Dt:
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11/10/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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07/17/2018
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Application #:
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15219029
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Filing Dt:
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07/25/2016
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Publication #:
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Pub Dt:
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01/26/2017
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Title:
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SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
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Patent #:
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Issue Dt:
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01/21/2020
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Application #:
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15333021
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Filing Dt:
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10/24/2016
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Publication #:
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Pub Dt:
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08/09/2018
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Title:
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LOAD LOCK FAST PUMP VENT
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Patent #:
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Issue Dt:
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12/29/2020
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Application #:
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15369573
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Filing Dt:
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12/05/2016
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Publication #:
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Pub Dt:
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03/23/2017
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Title:
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PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
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Patent #:
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Issue Dt:
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08/28/2018
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Application #:
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15376119
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Filing Dt:
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12/12/2016
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Publication #:
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Pub Dt:
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03/30/2017
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Title:
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TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
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Patent #:
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Issue Dt:
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10/22/2019
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Application #:
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15383734
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Filing Dt:
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12/19/2016
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Publication #:
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Pub Dt:
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06/08/2017
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Title:
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SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
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Patent #:
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Issue Dt:
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10/09/2018
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Application #:
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15386799
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Filing Dt:
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12/21/2016
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Publication #:
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Pub Dt:
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04/13/2017
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Title:
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WAFER TRAY SORTER WITH DOOR COUPLED TO DETECTOR
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Patent #:
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NONE
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Issue Dt:
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11/22/2022
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Application #:
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15465326
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Filing Dt:
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03/21/2017
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Publication #:
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Pub Dt:
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08/17/2017
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Title:
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HIGH SPEED SUBSTRATE ALIGNER APPARATUS
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Patent #:
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Issue Dt:
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08/11/2020
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Application #:
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15489449
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Filing Dt:
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04/17/2017
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Publication #:
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Pub Dt:
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10/05/2017
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Title:
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DUAL ARM ROBOT
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Patent #:
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Issue Dt:
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08/11/2020
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Application #:
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15497077
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Filing Dt:
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04/25/2017
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Publication #:
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Pub Dt:
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11/23/2017
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Title:
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AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
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Patent #:
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Issue Dt:
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03/17/2020
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Application #:
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15555347
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Filing Dt:
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09/01/2017
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Publication #:
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Pub Dt:
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02/08/2018
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Title:
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Inspection System
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Patent #:
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Issue Dt:
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03/17/2020
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Application #:
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15555347
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Filing Dt:
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09/01/2017
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Publication #:
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Pub Dt:
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02/08/2018
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Title:
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Inspection System
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Patent #:
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Issue Dt:
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04/09/2019
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Application #:
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15618525
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Filing Dt:
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06/09/2017
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Publication #:
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Pub Dt:
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12/13/2018
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Title:
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COLLABORATIVE ROBOT
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Patent #:
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Issue Dt:
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03/08/2022
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Application #:
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15634871
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Filing Dt:
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06/27/2017
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Publication #:
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Pub Dt:
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01/18/2018
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/07/2020
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Application #:
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15634957
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Filing Dt:
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06/27/2017
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Publication #:
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Pub Dt:
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10/19/2017
| | | | |
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Title:
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SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
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Patent #:
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Issue Dt:
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07/24/2018
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Application #:
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15682632
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Filing Dt:
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08/22/2017
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Title:
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COLLABORATIVE ROBOT
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Patent #:
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Issue Dt:
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03/31/2020
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Application #:
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15693871
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Filing Dt:
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09/01/2017
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Publication #:
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Pub Dt:
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03/08/2018
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/03/2019
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Application #:
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15695744
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Filing Dt:
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09/05/2017
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Publication #:
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Pub Dt:
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12/21/2017
| | | | |
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Title:
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COMPACT DIRECT DRIVE SPINDLE
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Patent #:
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Issue Dt:
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02/12/2019
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Application #:
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15702436
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Filing Dt:
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09/12/2017
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Publication #:
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Pub Dt:
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01/04/2018
| | | | |
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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08/18/2020
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Application #:
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15743727
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Filing Dt:
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01/11/2018
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Publication #:
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Pub Dt:
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07/26/2018
| | | | |
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH INTERCHANGEABLE MOTOR MODULES
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15765855
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Filing Dt:
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04/04/2018
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Publication #:
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Pub Dt:
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10/04/2018
| | | | |
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Title:
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HUMIDITY CONTROL IN SEMICONDUCTOR SYSTEMS
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Patent #:
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Issue Dt:
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03/17/2020
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Application #:
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15816728
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Filing Dt:
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11/17/2017
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Publication #:
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Pub Dt:
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04/05/2018
| | | | |
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Title:
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INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
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Patent #:
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Issue Dt:
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06/18/2019
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Application #:
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15849002
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Filing Dt:
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12/20/2017
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Publication #:
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Pub Dt:
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05/17/2018
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/26/2019
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Application #:
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15866215
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Filing Dt:
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01/09/2018
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Publication #:
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Pub Dt:
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05/24/2018
| | | | |
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Title:
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SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
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Patent #:
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Issue Dt:
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10/08/2019
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Application #:
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15875890
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Filing Dt:
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01/19/2018
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Publication #:
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Pub Dt:
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05/24/2018
| | | | |
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Title:
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Workpiece Support Structures and Apparatus for Accessing Same
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Patent #:
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Issue Dt:
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05/12/2020
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Application #:
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15880387
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Filing Dt:
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01/25/2018
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Publication #:
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Pub Dt:
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10/04/2018
| | | | |
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Title:
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METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
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|
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Patent #:
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|
Issue Dt:
|
10/22/2019
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Application #:
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15882735
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Filing Dt:
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01/29/2018
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Publication #:
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Pub Dt:
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08/23/2018
| | | | |
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Title:
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TOOL COMPILER
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15889811
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Filing Dt:
|
02/06/2018
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Publication #:
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Pub Dt:
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10/25/2018
| | | | |
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Title:
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METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT
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|
|
|
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Patent #:
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|
Issue Dt:
|
11/05/2019
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Application #:
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15952595
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Filing Dt:
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04/13/2018
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Publication #:
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Pub Dt:
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08/16/2018
| | | | |
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Title:
|
SEALED ROBOT DRIVE
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|
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Patent #:
|
|
Issue Dt:
|
02/23/2021
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Application #:
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15954230
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Filing Dt:
|
04/16/2018
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|
Publication #:
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Pub Dt:
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01/17/2019
| | | | |
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Title:
|
WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION
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|
|
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Patent #:
|
|
Issue Dt:
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11/24/2020
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Application #:
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15971827
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Filing Dt:
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05/04/2018
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Publication #:
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Pub Dt:
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05/16/2019
| | | | |
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Title:
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METHOD AND APPARATUS FOR HEALTH ASSESSMENT OF A TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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01/08/2019
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Application #:
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15981047
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Filing Dt:
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05/16/2018
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Publication #:
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Pub Dt:
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12/13/2018
| | | | |
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Title:
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COLLABORATIVE ROBOT
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/14/2021
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Application #:
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15986710
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Filing Dt:
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05/22/2018
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Publication #:
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Pub Dt:
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09/20/2018
| | | | |
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Title:
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SIDE OPENING UNIFIED POD
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Patent #:
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Issue Dt:
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08/13/2019
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Application #:
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16011978
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Filing Dt:
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06/19/2018
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Publication #:
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Pub Dt:
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01/24/2019
| | | | |
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Title:
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TOOL AUTO-TEACH METHOD AND APPARATUS
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|
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Patent #:
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|
Issue Dt:
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01/26/2021
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Application #:
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16029320
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Filing Dt:
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07/06/2018
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Publication #:
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Pub Dt:
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01/17/2019
| | | | |
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Title:
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SEMICONDUCTOR PROCESS TRANSPORT APPARATUS COMPRISING AN ADAPTER PENDANT
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Patent #:
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|
Issue Dt:
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01/12/2021
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Application #:
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16036828
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Filing Dt:
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07/16/2018
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Publication #:
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Pub Dt:
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11/15/2018
| | | | |
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Title:
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SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
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Patent #:
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|
Issue Dt:
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02/22/2022
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Application #:
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16043757
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Filing Dt:
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07/24/2018
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Publication #:
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Pub Dt:
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02/21/2019
| | | | |
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Title:
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DUAL ARM ROBOT
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16057480
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Filing Dt:
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08/07/2018
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Publication #:
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Pub Dt:
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12/06/2018
| | | | |
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Title:
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SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
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|
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Patent #:
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|
Issue Dt:
|
04/06/2021
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Application #:
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16115505
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Filing Dt:
|
08/28/2018
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Publication #:
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Pub Dt:
|
12/20/2018
| | | | |
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Title:
|
TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
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|
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Patent #:
|
|
Issue Dt:
|
08/03/2021
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Application #:
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16116025
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Filing Dt:
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08/29/2018
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Publication #:
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Pub Dt:
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12/20/2018
| | | | |
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Title:
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End Effector with Slides for Transferring Trays
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|
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Patent #:
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|
Issue Dt:
|
11/09/2021
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Application #:
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16119465
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Filing Dt:
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08/31/2018
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|
Publication #:
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Pub Dt:
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12/27/2018
| | | | |
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Title:
|
CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE ARTICLES
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|
|
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Patent #:
|
|
Issue Dt:
|
08/30/2022
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Application #:
|
16121148
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Filing Dt:
|
09/04/2018
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|
Publication #:
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Pub Dt:
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12/27/2018
| | | | |
|
Title:
|
SUBSTRATE TRANSPORT APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/31/2021
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Application #:
|
16150166
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Filing Dt:
|
10/02/2018
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|
Publication #:
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Pub Dt:
|
05/09/2019
| | | | |
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Title:
|
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/2021
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Application #:
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16151598
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Filing Dt:
|
10/04/2018
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|
Publication #:
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Pub Dt:
|
04/11/2019
| | | | |
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH INDEPENDENT ACCESSORY FEEDTHROUGH
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/19/2021
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Application #:
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16155714
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Filing Dt:
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10/09/2018
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|
Publication #:
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Pub Dt:
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05/16/2019
| | | | |
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Title:
|
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
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|
|
|
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Patent #:
|
|
Issue Dt:
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11/24/2020
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Application #:
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16181208
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Filing Dt:
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11/05/2018
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Publication #:
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Pub Dt:
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06/13/2019
| | | | |
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Title:
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INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
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Patent #:
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Issue Dt:
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04/13/2021
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Application #:
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16197087
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Filing Dt:
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11/20/2018
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Publication #:
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Pub Dt:
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05/30/2019
| | | | |
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Title:
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ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
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|
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Patent #:
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Issue Dt:
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02/21/2023
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Application #:
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16197107
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Filing Dt:
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11/20/2018
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Publication #:
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Pub Dt:
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01/26/2023
| | | | |
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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|
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Patent #:
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Issue Dt:
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02/11/2020
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Application #:
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16201539
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Filing Dt:
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11/27/2018
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Publication #:
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Pub Dt:
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05/30/2019
| | | | |
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Title:
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TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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01/26/2021
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Application #:
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16201899
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Filing Dt:
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11/27/2018
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Publication #:
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Pub Dt:
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03/28/2019
| | | | |
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Title:
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DUAL SCARA ARM
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Patent #:
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Issue Dt:
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08/10/2021
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Application #:
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16257595
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Filing Dt:
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01/25/2019
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Publication #:
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Pub Dt:
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08/01/2019
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Title:
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AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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10/27/2020
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Application #:
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16272974
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Filing Dt:
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02/11/2019
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Publication #:
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Pub Dt:
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06/06/2019
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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01/16/2024
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Application #:
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16304836
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Filing Dt:
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12/12/2018
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Publication #:
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Pub Dt:
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02/06/2020
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Title:
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METHOD FOR CLEANING A SYNTHETIC SURFACE
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Patent #:
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Issue Dt:
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07/28/2020
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Application #:
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16328848
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Filing Dt:
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02/27/2019
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Publication #:
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Pub Dt:
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06/20/2019
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Title:
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RETICLE COMPARTMENT AND DIFFUSOR PLATE
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Patent #:
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Issue Dt:
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02/07/2023
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Application #:
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16354954
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Filing Dt:
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03/15/2019
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Publication #:
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Pub Dt:
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09/19/2019
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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06/07/2022
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Application #:
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16364034
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Filing Dt:
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03/25/2019
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Publication #:
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Pub Dt:
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07/18/2019
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Title:
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SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
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Patent #:
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Issue Dt:
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12/27/2022
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Application #:
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16426983
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Filing Dt:
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05/30/2019
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Publication #:
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Pub Dt:
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01/02/2020
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/24/2020
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Application #:
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16444225
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Filing Dt:
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06/18/2019
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Publication #:
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Pub Dt:
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10/03/2019
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
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Patent #:
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Issue Dt:
|
10/31/2023
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Application #:
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16460676
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Filing Dt:
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07/02/2019
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Publication #:
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Pub Dt:
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01/02/2020
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
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Patent #:
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Issue Dt:
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09/13/2022
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Application #:
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16506679
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Filing Dt:
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07/09/2019
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Publication #:
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Pub Dt:
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10/31/2019
| | | | |
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Title:
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SEALED SWITCHED RELUCTANCE MOTOR
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Patent #:
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Issue Dt:
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09/08/2020
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Application #:
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16539819
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Filing Dt:
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08/13/2019
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Publication #:
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Pub Dt:
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12/05/2019
| | | | |
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Title:
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TOOL AUTO-TEACH METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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09/14/2021
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Application #:
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16552881
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Filing Dt:
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08/27/2019
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Publication #:
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Pub Dt:
|
05/21/2020
| | | | |
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Title:
|
SUBSTRATE TRANSPORT
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16566730
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Filing Dt:
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09/10/2019
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Publication #:
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Pub Dt:
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01/02/2020
| | | | |
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Title:
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UNEQUAL LINK SCARA ARM
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Patent #:
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Issue Dt:
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04/05/2022
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Application #:
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16570453
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Filing Dt:
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09/13/2019
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Publication #:
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Pub Dt:
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03/18/2021
| | | | |
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Title:
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METHOD AND APPARATUS FOR SUBSTRATE ALIGNMENT
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|
|
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Patent #:
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|
Issue Dt:
|
12/07/2021
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Application #:
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16592431
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Filing Dt:
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10/03/2019
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Publication #:
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Pub Dt:
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04/23/2020
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/05/2021
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Application #:
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16619020
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Filing Dt:
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12/03/2019
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Publication #:
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Pub Dt:
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06/04/2020
| | | | |
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Title:
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METHOD FOR CONTROLLING A PLC USING A PC PROGRAM
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|
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Patent #:
|
NONE
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Issue Dt:
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|
Application #:
|
16619707
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Filing Dt:
|
12/05/2019
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Publication #:
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Pub Dt:
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05/21/2020
| | | | |
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Title:
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INSPECTION SYSTEM AND METHOD OF INSPECTION FOR SUBSTRATE CONTAINERS
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|
|
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Patent #:
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|
Issue Dt:
|
01/31/2023
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Application #:
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16619713
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Filing Dt:
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12/05/2019
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Publication #:
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Pub Dt:
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06/25/2020
| | | | |
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Title:
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METHOD FOR INSPECTING A CONTAINER AND INSPECTION SYSTEM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/22/2020
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Application #:
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16660562
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Filing Dt:
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10/22/2019
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Publication #:
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Pub Dt:
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02/13/2020
| | | | |
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Title:
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SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
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|
|
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Patent #:
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|
Issue Dt:
|
06/28/2022
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Application #:
|
16660669
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Filing Dt:
|
10/22/2019
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Publication #:
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Pub Dt:
|
02/13/2020
| | | | |
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Title:
|
TOOL COMPILER
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|
|
|
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Patent #:
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Issue Dt:
|
01/03/2023
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Application #:
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16668290
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Filing Dt:
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10/30/2019
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Publication #:
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Pub Dt:
|
05/07/2020
| | | | |
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Title:
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TRANSPORT APPARATUS WITH LINEAR BEARING
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|
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Patent #:
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|
Issue Dt:
|
10/24/2023
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Application #:
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16674933
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Filing Dt:
|
11/05/2019
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Publication #:
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Pub Dt:
|
02/27/2020
| | | | |
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Title:
|
SEALED ROBOT DRIVE
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|
|
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Patent #:
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|
Issue Dt:
|
02/16/2021
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Application #:
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16692359
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Filing Dt:
|
11/22/2019
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Publication #:
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|
Pub Dt:
|
05/28/2020
| | | | |
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Title:
|
LOAD PORT MODULE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2021
|
Application #:
|
16692443
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Filing Dt:
|
11/22/2019
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|
Publication #:
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|
Pub Dt:
|
05/28/2020
| | | | |
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Title:
|
LOAD PORT MODULE
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|
|
|
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Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
16696822
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Filing Dt:
|
11/26/2019
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Publication #:
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Pub Dt:
|
05/28/2020
| | | | |
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Title:
|
SCALABLE MOTION CONTROL SYSTEM
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|
|
|
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Patent #:
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|
Issue Dt:
|
09/07/2021
|
Application #:
|
16702403
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Filing Dt:
|
12/03/2019
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|
Publication #:
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Pub Dt:
|
04/02/2020
| | | | |
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Title:
|
COMPACT DIRECT DRIVE SPINDLE
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/01/2020
|
Application #:
|
16722930
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Filing Dt:
|
12/20/2019
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Publication #:
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Pub Dt:
|
04/23/2020
| | | | |
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Title:
|
LOAD LOCK FAST PUMP VENT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/29/2021
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Application #:
|
16723009
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Filing Dt:
|
12/20/2019
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Publication #:
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Pub Dt:
|
04/23/2020
| | | | |
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Title:
|
CONTAINER STORAGE ADD-ON FOR BARE WORKPIECE STOCKER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/23/2022
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Application #:
|
16787184
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Filing Dt:
|
02/11/2020
|
|
Publication #:
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|
Pub Dt:
|
06/11/2020
| | | | |
|
Title:
|
TRANSPORT APPARATUS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/23/2021
|
Application #:
|
16793623
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Filing Dt:
|
02/18/2020
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Publication #:
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Pub Dt:
|
08/13/2020
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR BRUSHLESS ELECTRICAL MACHINE CONTROL
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|
Patent #:
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NONE
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Issue Dt:
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|
Application #:
|
16821149
|
Filing Dt:
|
03/17/2020
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|
Publication #:
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|
Pub Dt:
|
02/18/2021
| | | | |
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Title:
|
INSPECTION SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
12/07/2021
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Application #:
|
16825663
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Filing Dt:
|
03/20/2020
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Publication #:
|
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Pub Dt:
|
10/08/2020
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
|
08/02/2022
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Application #:
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16838785
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Filing Dt:
|
04/02/2020
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Publication #:
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Pub Dt:
|
12/10/2020
| | | | |
|
Title:
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POSITION FEEDBACK FOR SEALED ENVIRONMENTS
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Patent #:
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|
Issue Dt:
|
02/15/2022
|
Application #:
|
16872864
|
Filing Dt:
|
05/12/2020
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|
Publication #:
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|
Pub Dt:
|
08/27/2020
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
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|
|
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|
Patent #:
|
NONE
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Issue Dt:
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|
Application #:
|
16899151
|
Filing Dt:
|
06/11/2020
|
|
Publication #:
|
|
Pub Dt:
|
12/17/2020
| | | | |
|
Title:
|
SUBSTRATE PROCESS APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
11/09/2021
|
Application #:
|
16940976
|
Filing Dt:
|
07/28/2020
|
|
Publication #:
|
|
Pub Dt:
|
11/12/2020
| | | | |
|
Title:
|
RETICLE COMPARTMENT AND DIFFUSOR PLATE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2021
|
Application #:
|
16942255
|
Filing Dt:
|
07/29/2020
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|
Publication #:
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|
Pub Dt:
|
02/11/2021
| | | | |
|
Title:
|
ROBOT EMBEDDED VISION APPARATUS
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|
|
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|
Patent #:
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|
Issue Dt:
|
03/28/2023
|
Application #:
|
16990775
|
Filing Dt:
|
08/11/2020
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|
Publication #:
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Pub Dt:
|
01/28/2021
| | | | |
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Title:
|
DUAL ARM ROBOT
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/29/2022
|
Application #:
|
16990812
|
Filing Dt:
|
08/11/2020
|
|
Publication #:
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|
Pub Dt:
|
02/25/2021
| | | | |
|
Title:
|
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
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|
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Patent #:
|
|
Issue Dt:
|
03/15/2022
|
Application #:
|
16996409
|
Filing Dt:
|
08/18/2020
|
|
Publication #:
|
|
Pub Dt:
|
03/04/2021
| | | | |
|
Title:
|
SUBSTRATE TRANSPORT APPARATUS
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
17002587
|
Filing Dt:
|
08/25/2020
|
|
Publication #:
|
|
Pub Dt:
|
12/10/2020
| | | | |
|
Title:
|
WAFER ALIGNER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/11/2022
|
Application #:
|
17014575
|
Filing Dt:
|
09/08/2020
|
|
Publication #:
|
|
Pub Dt:
|
04/01/2021
| | | | |
|
Title:
|
TOOL AUTO-TEACH METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2022
|
Application #:
|
17081811
|
Filing Dt:
|
10/27/2020
|
|
Publication #:
|
|
Pub Dt:
|
02/11/2021
| | | | |
|
Title:
|
SUBSTRATE TRANSPORT APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/16/2023
|
Application #:
|
17102811
|
Filing Dt:
|
11/24/2020
|
|
Publication #:
|
|
Pub Dt:
|
06/10/2021
| | | | |
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Title:
|
INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
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|
