Patent Assignment Details
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Reel/Frame: | 009945/0001 | |
| Pages: | 3 |
| | Recorded: | 05/04/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09305017
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Filing Dt:
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05/04/1999
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR EUV LITHOGRAPHY
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Assignee
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89518 HEIDENHEIM, GERMANY |
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Correspondence name and address
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OHLANDT, GREELEY ET AL.
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CHARLES N. J. RUGGIERO
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ONE LANDMARK SQUARE
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9TH FLOOR
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STAMFORD, CT 06901-2682
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