Total properties:
24
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Patent #:
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Issue Dt:
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02/25/1986
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Application #:
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06611522
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Filing Dt:
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05/17/1984
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Title:
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CENTRIFUGAL WAFER PROCESSOR
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Patent #:
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Issue Dt:
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02/14/1989
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Application #:
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07043852
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Filing Dt:
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04/29/1987
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Title:
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CLEANING APPARATUS
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Patent #:
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Issue Dt:
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09/26/1989
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Application #:
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07144515
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Filing Dt:
|
01/15/1988
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Title:
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MEGASONIC CLEANING APPARATUS
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Patent #:
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Issue Dt:
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08/08/1989
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Application #:
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07197867
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Filing Dt:
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05/24/1988
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Title:
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APPARATUS FOR TREATING WAFERS UTILIZING MEGASONIC ENERGY
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Patent #:
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Issue Dt:
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03/12/1991
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Application #:
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07272501
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Filing Dt:
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11/16/1988
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Title:
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MEGASONIC CLEANING APPARATUS
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Patent #:
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Issue Dt:
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08/06/1991
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Application #:
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07482086
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Filing Dt:
|
02/15/1990
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Title:
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MEGASONIC CLEANING METHOD
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Patent #:
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Issue Dt:
|
02/25/1992
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Application #:
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07598426
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Filing Dt:
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10/16/1990
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Title:
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SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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09/22/1992
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Application #:
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07598909
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Filing Dt:
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10/16/1990
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Title:
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SINGLE CHAMBER MEGASONIC ENERGY CLEANER
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Patent #:
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Issue Dt:
|
02/15/1994
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Application #:
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07809799
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Filing Dt:
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12/18/1991
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Title:
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SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSENG SYSTEM
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Patent #:
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Issue Dt:
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11/22/1994
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Application #:
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08168142
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Filing Dt:
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12/17/1993
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Title:
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VENTILATOR FOR TENT
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|
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Patent #:
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Issue Dt:
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07/30/1996
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Application #:
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08213599
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Filing Dt:
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03/16/1994
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Title:
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CONTINUOUS FLOW VAPOR DRYER SYSTEM
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Patent #:
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Issue Dt:
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09/17/1996
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Application #:
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08275807
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Filing Dt:
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07/15/1994
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Title:
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METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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07/09/1996
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Application #:
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08316940
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Filing Dt:
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10/03/1994
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Title:
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MEGASONIC CLEANING SYSTEM
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Patent #:
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Issue Dt:
|
08/12/1997
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Application #:
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08361139
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Filing Dt:
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12/21/1994
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Title:
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SEMICONDUCTOR WAFER CLEANING SYSTEM
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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08724518
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Filing Dt:
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09/30/1996
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Title:
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WAFER CLEANING SYSTEM
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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08908330
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Filing Dt:
|
08/07/1997
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Title:
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SEMICONDUCTOR WAFER CLEANING SYSTEM
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|
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Patent #:
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|
Issue Dt:
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12/07/1999
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Application #:
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08908345
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Filing Dt:
|
08/07/1997
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Title:
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SEMICONDUCTOR WAFER CLEANING SYSTEM
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|
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08910033
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Filing Dt:
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08/11/1997
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Title:
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SEMICONDUCTOR WAFER CLEANING SYSTEM
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|
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Patent #:
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Issue Dt:
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10/03/2000
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Application #:
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09040176
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Filing Dt:
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03/17/1998
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Title:
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GAS SEAL AND SUPPORT FOR ROTATING SEMICONDUCTOR PROCESSOR
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|
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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09057182
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Filing Dt:
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04/08/1998
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Title:
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WAFER CLEANING SYSTEM
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|
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Patent #:
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Issue Dt:
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09/26/2000
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Application #:
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09103930
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Filing Dt:
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06/24/1998
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Title:
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CENTRIFUGAL WAFER PROCESSOR AND METHOD
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|
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09358568
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Filing Dt:
|
07/20/1999
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Title:
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SEMICONDUCTOR WAFER CLEANING METHOD
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Patent #:
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|
Issue Dt:
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10/02/2001
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Application #:
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09643328
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Filing Dt:
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08/22/2000
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Title:
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WAFER CLEANING METHOD
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Patent #:
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Issue Dt:
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Application #:
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UNAVAILABLE
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Filing Dt:
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Title:
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