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Total properties:
35
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10267373
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Filing Dt:
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10/09/2002
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Publication #:
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Pub Dt:
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04/10/2003
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Title:
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ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET (EUV) RADIATION BASED ON A GAS DISCHARGE
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10357173
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Filing Dt:
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02/03/2003
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON A RADIATION-EMITTING PLASMA
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10357899
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Filing Dt:
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02/04/2003
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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ARRANGEMENT FOR MONITORING THE ENERGY RADIATED BY AN EUV RADIATION SOURCE
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10360067
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Filing Dt:
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02/07/2003
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Publication #:
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Pub Dt:
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10/23/2003
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Title:
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METHOD FOR ENERGY CONTROL OF PULSED DRIVEN, GAS DISCHARGED-COUPLED BEAM SOURCES
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10360372
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Filing Dt:
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02/07/2003
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Publication #:
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Pub Dt:
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08/28/2003
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Title:
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METHOD FOR ENERGY STABILIZATION OF GAS DISCHARGED PUMPED IN SELECTED IMPULSE FOLLOWING DRIVEN BEAM SOURCES
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10393930
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Filing Dt:
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03/20/2003
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Publication #:
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Pub Dt:
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09/25/2003
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Title:
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DETECTOR ARRANGEMENT FOR ENERGY MEASUREMENT OF PULSED X-RAY RADIATION
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10407394
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Filing Dt:
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04/04/2003
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Publication #:
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Pub Dt:
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10/09/2003
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Title:
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ARRANGEMENT FOR THE SUPPRESSION OF PARTICLE EMISSION IN THE GENERATION OF RADIATION BASED ON HOT PLASMA
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10425301
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Filing Dt:
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04/29/2003
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Publication #:
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Pub Dt:
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10/30/2003
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Title:
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METHOD FOR THE STABILIZATION OF THE RADIATION OUTPUT OF A GAS DISCHARGE-COUPLED RADIATION SOURCE IN PULSED OPERATION
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Patent #:
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Issue Dt:
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02/12/2008
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Application #:
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10567942
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Filing Dt:
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02/23/2006
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Publication #:
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Pub Dt:
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07/20/2006
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Title:
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PLASMA RADIATION SOURCE AND DEVICE FOR CREATING A GAS CURTAIN FOR PLASMA RADIATION SOURCES
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10682000
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Filing Dt:
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10/08/2003
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Publication #:
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Pub Dt:
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06/03/2004
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Title:
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ARRANGEMENT FOR THE OPTICAL DETECTION OF A MOVING TARGET FLOW FOR A PULSED ENERGY BEAM PUMPED RADIATION
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10697579
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Filing Dt:
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10/30/2003
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Publication #:
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Pub Dt:
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07/15/2004
| | | | |
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Title:
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RADIATION SOURCE FOR GENERATING EXTREME ULTRAVIOLET RADIATION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10722910
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Filing Dt:
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11/28/2003
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Publication #:
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Pub Dt:
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06/02/2005
| | | | |
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Title:
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Multi-level accomodation unit
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Patent #:
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Issue Dt:
|
11/09/2004
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Application #:
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10741882
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Filing Dt:
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12/19/2003
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Publication #:
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Pub Dt:
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07/29/2004
| | | | |
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Title:
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RADIATION SOURCE WITH HIGH AVERAGE EUV RADIATION OUTPUT
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10784438
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Filing Dt:
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02/23/2004
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Publication #:
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Pub Dt:
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08/26/2004
| | | | |
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Title:
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ARRANGEMENT FOR DEBRIS REDUCTION IN A RADIATION SOURCE BASED ON A PLASMA
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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11020749
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Filing Dt:
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12/22/2004
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Publication #:
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Pub Dt:
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09/15/2005
| | | | |
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Title:
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ARRANGEMENT FOR GENERATING PULSED CURRENTS WITH A HIGH REPETITION RATE AND HIGH CURRENT STRENGTH FOR GAS DISCHARGE PUMPED RADIATION SOURCES
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|
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Patent #:
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|
Issue Dt:
|
09/25/2007
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Application #:
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11149916
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Filing Dt:
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06/10/2005
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Publication #:
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Pub Dt:
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12/15/2005
| | | | |
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Title:
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APPARATUS FOR THE TEMPORALLY STABLE GENERATION OF EUV RADIATION BY MEANS OF A LASER-INDUCED PLASMA
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Patent #:
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Issue Dt:
|
07/29/2008
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Application #:
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11182363
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Filing Dt:
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07/15/2005
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Publication #:
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Pub Dt:
|
02/02/2006
| | | | |
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Title:
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ARRANGEMENT FOR PROVIDING TARGET MATERIAL FOR THE GENERATION OF SHORT-WAVELENGTH ELECTROMAGNETIC RADIATION
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|
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Patent #:
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Issue Dt:
|
05/13/2008
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Application #:
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11213007
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Filing Dt:
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08/26/2005
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Publication #:
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Pub Dt:
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03/02/2006
| | | | |
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Title:
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ARRANGEMENT FOR PROVIDING A REPRODUCIBLE TARGET FLOW FOR THE ENERGY BEAM-INDUCED GENERATION OF SHORT-WAVELENGTH ELECTROMAGNETIC RADIATION
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|
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Patent #:
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Issue Dt:
|
01/13/2009
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Application #:
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11354324
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Filing Dt:
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02/14/2006
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|
Publication #:
|
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Pub Dt:
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08/31/2006
| | | | |
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Title:
|
DEVICE AND METHOD FOR GENERATING EXTREME ULTRAVIOLET (EUV) RADIATION
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|
|
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Patent #:
|
|
Issue Dt:
|
04/29/2008
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Application #:
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11380487
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Filing Dt:
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04/27/2006
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|
Publication #:
|
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Pub Dt:
|
11/02/2006
| | | | |
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Title:
|
METHOD AND ARRANGEMENT FOR THE SUPPRESSION OF DEBRIS IN THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED ON A PLASMA
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/19/2007
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Application #:
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11393325
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Filing Dt:
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03/30/2006
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Publication #:
|
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Pub Dt:
|
10/05/2006
| | | | |
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Title:
|
RADIATION SOURCE FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
02/12/2008
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Application #:
|
11402391
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Filing Dt:
|
04/11/2006
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|
Publication #:
|
|
Pub Dt:
|
10/12/2006
| | | | |
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Title:
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COLLECTOR MIRROR FOR PLASMA-BASED, SHORT-WAVELENGTH RADIATION SOURCES
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|
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Patent #:
|
|
Issue Dt:
|
02/10/2009
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Application #:
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11421144
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Filing Dt:
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05/31/2006
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Publication #:
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Pub Dt:
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12/07/2006
| | | | |
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Title:
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ARRANGEMENT FOR THE GENERATION OF INTENSIVE SHORT-WAVELENGTH RADIATION BASED ON A GAS DISCHARGE PLASMA
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|
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Patent #:
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Issue Dt:
|
05/12/2009
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Application #:
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11426086
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Filing Dt:
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06/23/2006
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Publication #:
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Pub Dt:
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04/19/2007
| | | | |
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Title:
|
ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION
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|
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Patent #:
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Issue Dt:
|
08/19/2008
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Application #:
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11504957
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Filing Dt:
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08/16/2006
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Publication #:
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Pub Dt:
|
03/01/2007
| | | | |
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Title:
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EUV RADIATION SOURCE WITH HIGH RADIATION OUTPUT BASED ON A GAS DISCHARGE
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|
|
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Patent #:
|
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Issue Dt:
|
06/02/2009
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Application #:
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11560118
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Filing Dt:
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11/15/2006
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Publication #:
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Pub Dt:
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05/24/2007
| | | | |
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Title:
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ARRANGEMENT FOR THE GENERATION OF SHORT-WAVELENGTH RADIATION BASED ON A GAS DISCHARGE PLASMA AND METHOD FOR THE PRODUCTION OF COOLANT-CARRYING ELECTRODE HOUSING
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Patent #:
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Issue Dt:
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02/12/2008
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Application #:
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11623628
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Filing Dt:
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01/16/2007
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Publication #:
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Pub Dt:
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07/26/2007
| | | | |
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Title:
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NARROW-BAND TRANSMISSION FILTER FOR EUV RADIATION
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|
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Patent #:
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Issue Dt:
|
01/13/2009
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Application #:
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11693169
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
|
10/04/2007
| | | | |
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Title:
|
ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON AN ELECTRICALLY OPERATED GAS DISCHARGE
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|
|
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Patent #:
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Issue Dt:
|
08/30/2011
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Application #:
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11693207
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
|
10/04/2007
| | | | |
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Title:
|
ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BY MEANS OF AN ELECTRICALLY OPERATED GAS DISCHARGE
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|
|
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Patent #:
|
|
Issue Dt:
|
10/06/2009
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Application #:
|
11733845
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Filing Dt:
|
04/11/2007
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Publication #:
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Pub Dt:
|
03/20/2008
| | | | |
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Title:
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ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION FROM A PLASMA GENERATED BY AN ENERGY BEAM WITH HIGH CONVERSION EFFICIENCY AND MINIMUM CONTAMINATION
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|
|
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Patent #:
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|
Issue Dt:
|
01/19/2010
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Application #:
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11756026
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Filing Dt:
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05/31/2007
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Publication #:
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Pub Dt:
|
01/10/2008
| | | | |
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Title:
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ARRANGEMENT FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION BY MEANS OF ELECTRIC DISCHARGE AT ELECTRODES WHICH CAN BE REGENERATED
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|
|
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Patent #:
|
|
Issue Dt:
|
07/05/2011
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Application #:
|
11949924
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Filing Dt:
|
12/04/2007
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|
Publication #:
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Pub Dt:
|
06/19/2008
| | | | |
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Title:
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METHOD AND ARRANGEMENT FOR STABILIZING THE AVERAGE EMITTED RADIATION OUTPUT OF A PULSED RADIATION SOURCE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/29/2009
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Application #:
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12041121
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Filing Dt:
|
03/03/2008
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Publication #:
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Pub Dt:
|
10/30/2008
| | | | |
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Title:
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ARRANGEMENT FOR SWITCHING HIGH ELECTRIC CURRENTS BY A GAS DISCHARGE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/06/2010
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Application #:
|
12120536
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Filing Dt:
|
05/14/2008
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Publication #:
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Pub Dt:
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11/20/2008
| | | | |
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Title:
|
DEVICE FOR THE GENERATION OF A GAS CURTAIN FOR PLASMA-BASED EUV RADIATION SOURCES
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|
|
|
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Patent #:
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Issue Dt:
|
04/03/2012
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Application #:
|
12128784
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Filing Dt:
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05/29/2008
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|
Publication #:
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Pub Dt:
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01/15/2009
| | | | |
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Title:
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METHOD AND ARRANGEMENT FOR CLEANING OPTICAL SURFACES IN PLASMA-BASED RADIATION SOURCES
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