Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 005808/0007 | |
| Pages: | 3 |
| | Recorded: | 09/24/1990 | | |
| Conveyance: | MERGER (SEE DOCUMENT FOR DETAILS). EFFECTIVE ON 03/13/1990DE |
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Total properties:
3
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Patent #:
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Issue Dt:
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02/28/1984
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Application #:
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06234307
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Filing Dt:
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02/13/1981
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Title:
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MODULAR LOADLOCK
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Patent #:
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Issue Dt:
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07/20/1982
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Application #:
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06234346
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Filing Dt:
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02/13/1981
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Title:
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ADJUSTABLE ELECTRODE PLASMA PROCESSING CHAMBER
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Patent #:
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Issue Dt:
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11/20/1984
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Application #:
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06557860
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Filing Dt:
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12/05/1983
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Title:
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WORKPIECE TRANSFER MECHANISM
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Correspondence name and address
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THOMAS E. SCHATZEL
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3211 SCOTT BLVD.
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SANTA CLARA, CA 95051
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