Patent Assignment Details
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Reel/Frame: | 014396/0008 | |
| Pages: | 3 |
| | Recorded: | 08/13/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10639510
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Filing Dt:
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08/13/2003
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Publication #:
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Pub Dt:
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03/04/2004
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Title:
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METHOD AND APPARATUS FOR TRANSFERRING HEAT FROM A SUBSTRATE TO A CHUCK
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Assignee
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3-6, AKASAKA 5-CHOME |
MINATO-KU, TOKYO, JAPAN 107 |
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Correspondence name and address
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PILLSBURY WINTHROP LLP
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DALE S. LAZAR
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INTELLECTUAL PROPERTY GROUP
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P.O. BOX 10500
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MCLEAN, VA 22102
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