Patent Assignment Details
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Reel/Frame: | 028166/0011 | |
| Pages: | 7 |
| | Recorded: | 05/07/2012 | | |
Attorney Dkt #: | BEAERO.018C1 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/25/2012
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Application #:
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12855678
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Filing Dt:
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08/12/2010
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Publication #:
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Pub Dt:
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12/02/2010
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Title:
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CAPACITIVELY COUPLED PLASMA REACTOR HAVING VERY AGILE WAFER TEMPERATURE CONTROL
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Assignee
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3355 EAST LA PALMA AVENUE |
ANAHEIM, CALIFORNIA 92806 |
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Correspondence name and address
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MATTHEW V. LINCICUM
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2040 MAIN STREET
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14TH FLOOR
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IRVINE, CA 92614
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