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Patent Assignment Details
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Reel/Frame:012703/0016   Pages: 3
Recorded: 03/15/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
11/23/2004
Application #:
10097603
Filing Dt:
03/15/2002
Publication #:
Pub Dt:
09/18/2003
Title:
SEMICONDUCTOR PROCESSING TEMPERATURE CONTROL
Assignor
1
Exec Dt:
03/11/2002
Assignee
1
3390 VISA COURT
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
LONG ALDRIDGE & NORMAN LLP
JOHN M. KELLY
701 PENNSYLVANIA AVENUE, N.W.
SUITE 600
WASHINGTON, DC 20004

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