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Reel/Frame:	049648/0016			Pages:	32
		Recorded:	07/01/2019
Attorney Dkt #:	172956-303200
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 76

Patent #:	6272400	Issue Dt:	08/07/2001	Application #:	09114549	Filing Dt:	07/13/1998
Title:	VACUUM NETWORK CONTROLLER

Patent #:	6076372	Issue Dt:	06/20/2000	Application #:	09222809	Filing Dt:	12/30/1998
Title:	VARIABLE LOAD REFRIGERATION SYSTEM PARTICULARY FOR CRYOGENIC TEMPATURES

Patent #:	6105388	Issue Dt:	08/22/2000	Application #:	09222810	Filing Dt:	12/30/1998
Title:	MULTIPLE CIRCUIT CRYOGENIC LIQUEFACTION OF INDUSTRIAL GAS

Patent #:	6176102	Issue Dt:	01/23/2001	Application #:	09222812	Filing Dt:	12/30/1998
Title:	METHOD FOR PROVIDING REFRIGERATION

Patent #:	6041621	Issue Dt:	03/28/2000	Application #:	09222813	Filing Dt:	12/30/1998
Title:	SINGLE CIRCUIT CRYOGENIC LIQUEFACTION OF INDUSTRIAL GAS

Patent #:	6041620	Issue Dt:	03/28/2000	Application #:	09222814	Filing Dt:	12/30/1998
Title:	CRYOGENIC INDUSTRIAL GAS LIQUEFACTION WITH HYBRID REFRIGERATION GENERATION

Patent #:	6065305	Issue Dt:	05/23/2000	Application #:	09222815	Filing Dt:	12/30/1998
Title:	MULTICOMPONENT REFRIGERANT COOLING WITH INTERNAL RECYCLE

Patent #:	6053008	Issue Dt:	04/25/2000	Application #:	09222816	Filing Dt:	12/30/1998
Title:	METHOD FOR CARRYING OUT SUBAMBIENT TEMPERATURE, ESPECIALLY CRYOGENIC, SEPARATION USING REFRIGERATION FROM A MULTICOMPONENT REFRIGERANT FLUID

Patent #:	6290763	Issue Dt:	09/18/2001	Application #:	09269061	Filing Dt:	03/18/1999
Title:	AZO DYES FOR INK-JET PRINTING

Patent #:	6125656	Issue Dt:	10/03/2000	Application #:	09432214	Filing Dt:	11/03/1999
Title:	CRYOGENIC RECTIFICATION METHOD FOR PRODUCING NITROGEN GAS AND LIQUID NITROGEN

Patent #:	6205812	Issue Dt:	03/27/2001	Application #:	09453297	Filing Dt:	12/03/1999
Title:	CRYOGENIC ULTRA COLD HYBRID LIQUEFIER

Patent #:	6426019	Issue Dt:	07/30/2002	Application #:	09545670	Filing Dt:	04/07/2000
Title:	VARIABLE LOAD REFRIGERATION SYSTEM PARTICULARLY FOR CRYOGENIC TEMPERATURES

Patent #:	6327866	Issue Dt:	12/11/2001	Application #:	09605472	Filing Dt:	06/28/2000
Title:	Food freezing method using a multicomponent refriigerant

Patent #:	6330811	Issue Dt:	12/18/2001	Application #:	09606088	Filing Dt:	06/29/2000
Title:	Compression system for cryogenic refrigeration with multicomponent refrigerant

Patent #:	6327863	Issue Dt:	12/11/2001	Application #:	09627579	Filing Dt:	07/28/2000
Title:	Cryopump with gate valve control

Patent #:	6481223	Issue Dt:	11/19/2002	Application #:	09728501	Filing Dt:	11/30/2000
Publication #:	US20010042379	Pub Dt:	11/22/2001
Title:	REFRIGERANT BLEND FREE OF R-22 FOR USE IN ULTRALOW TEMPERATURE REFRIGERATION

Patent #:	6357257	Issue Dt:	03/19/2002	Application #:	09768505	Filing Dt:	01/25/2001
Title:	CRYOGENIC INDUSTRIAL GAS LIQUEFACTION WITH AZEOTROPIC FLUID FORECOOLING

Patent #:	6408631	Issue Dt:	06/25/2002	Application #:	09780026	Filing Dt:	02/09/2001
Title:	WAVE SPRING LOADED SPLIT SEAL SYSTEM

Patent #:	6671583	Issue Dt:	12/30/2003	Application #:	09822106	Filing Dt:	03/30/2001
Publication #:	US20020143411	Pub Dt:	10/03/2002
Title:	VACUUM SYSTEM INFORMATION NETWORK

Patent #:	6530237	Issue Dt:	03/11/2003	Application #:	09824530	Filing Dt:	04/02/2001
Publication #:	US20020139129	Pub Dt:	10/03/2002
Title:	REFRIGERATION SYSTEM PRESSURE CONTROL USING A GAS VOLUME

Patent #:	6574978	Issue Dt:	06/10/2003	Application #:	09870385	Filing Dt:	05/30/2001
Publication #:	US20020017106	Pub Dt:	02/14/2002
Title:	VERY LOW TEMPERATURE REFRIGERATION SYSTEM WITH CONTROLLED COOL DOWN AND WARM UP RATES AND LONG TERM HEATING CAPABILITIES

Patent #:	6510697	Issue Dt:	01/28/2003	Application #:	09878160	Filing Dt:	06/07/2001
Publication #:	US20020184896	Pub Dt:	12/12/2002
Title:	SYSTEM AND METHOD FOR RECOVERING FROM A POWER FAILURE IN A CRYOPUMP

Patent #:	6474082	Issue Dt:	11/05/2002	Application #:	09886936	Filing Dt:	06/21/2001
Publication #:	US20020011073	Pub Dt:	01/31/2002
Title:	VERY LOW TEMPERATURE FLOW SWITCH APPARATUS

Patent #:	6560981	Issue Dt:	05/13/2003	Application #:	09894964	Filing Dt:	06/28/2001
Publication #:	US20020035841	Pub Dt:	03/28/2002
Title:	MIXED REFRIGERANT TEMPERATURE CONTROL USING A PRESSURE REGULATING VALVE

Patent #:	6502410	Issue Dt:	01/07/2003	Application #:	09894968	Filing Dt:	06/28/2001
Publication #:	US20020040584	Pub Dt:	04/11/2002
Title:	NONFLAMMABLE MIXED REFRIGERANTS (MR) FOR USE WITH VERY LOW TEMPERATURE THROTTLE-CYCLE REFRIGERATION SYSTEMS

Patent #:	7127901	Issue Dt:	10/31/2006	Application #:	09909863	Filing Dt:	07/20/2001
Publication #:	US20030014985	Pub Dt:	01/23/2003
Title:	HELIUM MANAGEMENT CONTROL SYSTEM

Patent #:	6494054	Issue Dt:	12/17/2002	Application #:	09930166	Filing Dt:	08/16/2001
Title:	MULTICOMPONENT REFRIGERATION FLUID REFRIGERATION SYSTEM WITH AUXILIARY AMMONIA CASCADE CIRCUIT

Patent #:	6425264	Issue Dt:	07/30/2002	Application #:	09930199	Filing Dt:	08/16/2001
Title:	CRYOGENIC REFRIGERATION SYSTEM

Patent #:	7016751	Issue Dt:	03/21/2006	Application #:	09948303	Filing Dt:	09/06/2001
Publication #:	US20030014160	Pub Dt:	01/16/2003
Title:	VACUUM SYSTEM CENTRAL CONTROL INFORMATION SERVER

Patent #:	6438994	Issue Dt:	08/27/2002	Application #:	09963450	Filing Dt:	09/27/2001
Title:	METHOD FOR PROVIDING REFRIGERATION USING A TURBOEXPANDER CYCLE

Patent #:	6427483	Issue Dt:	08/06/2002	Application #:	09986524	Filing Dt:	11/09/2001
Title:	CRYOGENIC INDUSTRIAL GAS REFRIGERATION SYSTEM

Patent #:	6598406	Issue Dt:	07/29/2003	Application #:	10166577	Filing Dt:	06/10/2002
Publication #:	US20020174661	Pub Dt:	11/28/2002
Title:	WAVE SPRING LOADED SPLIT SEAL SYSTEM

Patent #:	6595009	Issue Dt:	07/22/2003	Application #:	10196420	Filing Dt:	07/17/2002
Title:	METHOD FOR PROVIDING REFRIGERATION USING TWO CIRCUITS WITH DIFFERING MULTICOMPONENT REFRIGERANTS

Patent #:	6881354	Issue Dt:	04/19/2005	Application #:	10201287	Filing Dt:	07/24/2002
Publication #:	US20030042463	Pub Dt:	03/06/2003
Title:	MULTICOMPONENT REFRIGERANT FLUIDS FOR LOW AND CRYOGENIC TEMPERATURES

Patent #:	7059144	Issue Dt:	06/13/2006	Application #:	10281881	Filing Dt:	10/28/2002
Publication #:	US20030115893	Pub Dt:	06/26/2003
Title:	METHODS OF FREEZEOUT PREVENTION FOR VERY LOW TEMPERATURE MIXED REFRIGERANT SYSTEMS

Patent #:	6722145	Issue Dt:	04/20/2004	Application #:	10316176	Filing Dt:	12/10/2002
Publication #:	US20030115894	Pub Dt:	06/26/2003
Title:	HIGH EFFICIENCY VERY-LOW TEMPERATURE MIXED REFRIGERANT SYSTEM WITH RAPID COOL DOWN

Patent #:	6843065	Issue Dt:	01/18/2005	Application #:	10425001	Filing Dt:	04/28/2003
Publication #:	US20040020221	Pub Dt:	02/05/2004
Title:	VERY LOW TEMPERATURE REFRIGERATION SYSTEM WITH CONTROLLED COOL DOWN AND WARM UP RATES AND LONG TERM HEATING CAPABILITIES

Patent #:	7111467	Issue Dt:	09/26/2006	Application #:	10470123	Filing Dt:	02/09/2004
Publication #:	US20040129015	Pub Dt:	07/08/2004
Title:	ULTRA-LOW TEMPERATURE CLOSED-LOOP RECIRCULATING GAS CHILLING SYSTEM

Patent #:	6895766	Issue Dt:	05/24/2005	Application #:	10608779	Filing Dt:	06/27/2003
Publication #:	US20040261425	Pub Dt:	12/30/2004
Title:	FAIL-SAFE CRYOPUMP SAFETY PURGE DELAY

Patent #:	7024866	Issue Dt:	04/11/2006	Application #:	10734079	Filing Dt:	12/11/2003
Publication #:	US20050126186	Pub Dt:	06/16/2005
Title:	AXIAL LOADED SEAL SYSTEM WITH A STATIC L-SEAL

Patent #:	7320224	Issue Dt:	01/22/2008	Application #:	10763056	Filing Dt:	01/21/2004
Publication #:	US20050155358	Pub Dt:	07/21/2005
Title:	METHOD AND APPARATUS FOR DETECTING AND MEASURING STATE OF FULLNESS IN CRYOPUMPS

Patent #:	7194867	Issue Dt:	03/27/2007	Application #:	10804842	Filing Dt:	03/19/2004
Publication #:	US20050204753	Pub Dt:	09/22/2005
Title:	INTEGRATED ROUGH/PURGE/VENT (RPV) VALVE

Patent #:	7313922	Issue Dt:	01/01/2008	Application #:	10948955	Filing Dt:	09/24/2004
Publication #:	US20060064990	Pub Dt:	03/30/2006
Title:	HIGH CONDUCTANCE CRYOPUMP FOR TYPE III GAS PUMPING

Patent #:	RE40627	Issue Dt:	01/27/2009	Application #:	11032701	Filing Dt:	01/07/2005
Title:	NONFLAMMABLE MIXED REFRIGERANTS (MR) FOR USE WITH VERY LOW TEMPERATURE THROTTLE-CYCLE REFRIGERATION SYSTEMS

Patent #:	NONE	Issue Dt:		Application #:	11046655	Filing Dt:	01/28/2005
Publication #:	US20050253107	Pub Dt:	11/17/2005
Title:	Refrigeration cycle utilizing a mixed inert component refrigerant

Patent #:	7103428	Issue Dt:	09/05/2006	Application #:	11071996	Filing Dt:	03/04/2005
Publication #:	US20050197722	Pub Dt:	09/08/2005
Title:	REMOTE DISPLAY MODULE

Patent #:	7234310	Issue Dt:	06/26/2007	Application #:	11081003	Filing Dt:	03/15/2005
Publication #:	US20070000261	Pub Dt:	01/04/2007
Title:	VERY LOW TEMPERATURE REFRIGERATION SYSTEM HAVING A SCROLL COMPRESSOR WITH LIQUID INJECTION

Patent #:	7415831	Issue Dt:	08/26/2008	Application #:	11136325	Filing Dt:	05/23/2005
Publication #:	US20050262852	Pub Dt:	12/01/2005
Title:	INTEGRATION OF AUTOMATED CRYOPUMP SAFETY PURGE

Patent #:	7289863	Issue Dt:	10/30/2007	Application #:	11206675	Filing Dt:	08/18/2005
Publication #:	US20070043534	Pub Dt:	02/22/2007
Title:	SYSTEM AND METHOD FOR ELECTRONIC DIAGNOSTICS OF A PROCESS VACUUM ENVIRONMENT

Patent #:	7490483	Issue Dt:	02/17/2009	Application #:	11244323	Filing Dt:	10/05/2005
Publication #:	US20060075775	Pub Dt:	04/13/2006
Title:	EFFICIENT HEAT EXCHANGER FOR REFRIGERATION PROCESS

Patent #:	7478540	Issue Dt:	01/20/2009	Application #:	11349060	Filing Dt:	02/07/2006
Publication #:	US20060168976	Pub Dt:	08/03/2006
Title:	METHODS OF FREEZEOUT PREVENTION AND TEMPERATURE CONTROL FOR VERY LOW TEMPERATURE MIXED REFRIGERANT SYSTEMS

Patent #:	7788942	Issue Dt:	09/07/2010	Application #:	11590673	Filing Dt:	10/31/2006
Publication #:	US20070107448	Pub Dt:	05/17/2007
Title:	HELIUM MANAGEMENT CONTROL SYSTEM

Patent #:	8082741	Issue Dt:	12/27/2011	Application #:	11803420	Filing Dt:	05/15/2007
Publication #:	US20080282710	Pub Dt:	11/20/2008
Title:	INTEGRAL FACET CRYOPUMP, WATER VAPOR PUMP, OR HIGH VACUUM PUMP

Patent #:	10760562	Issue Dt:	09/01/2020	Application #:	12008985	Filing Dt:	01/15/2008
Publication #:	US20080168778	Pub Dt:	07/17/2008
Title:	PRESSURE BURST FREE HIGH CAPACITY CRYOPUMP

Patent #:	9970427	Issue Dt:	05/15/2018	Application #:	12177737	Filing Dt:	07/22/2008
Publication #:	US20090007574	Pub Dt:	01/08/2009
Title:	Integration of Automated Cryopump Safety Purge

Patent #:	8091381	Issue Dt:	01/10/2012	Application #:	12358448	Filing Dt:	01/23/2009
Publication #:	US20090133436	Pub Dt:	05/28/2009
Title:	EFFICIENT HEAT EXCHANGER FOR REFRIGERATION PROCESS

Patent #:	8261562	Issue Dt:	09/11/2012	Application #:	12848681	Filing Dt:	08/02/2010
Publication #:	US20100313583	Pub Dt:	12/16/2010
Title:	HELIUM MANAGEMENT CONTROL SYSTEM

Patent #:	8874274	Issue Dt:	10/28/2014	Application #:	12864142	Filing Dt:	10/14/2010
Publication #:	US20110016891	Pub Dt:	01/27/2011
Title:	Cryopump Network

Patent #:	9567988	Issue Dt:	02/14/2017	Application #:	12936129	Filing Dt:	01/24/2011
Publication #:	US20110126553	Pub Dt:	06/02/2011
Title:	CRYOGENIC PUMP EMPLOYING TIN-GALLIUM ALLOYS AND METHODS OF USE

Patent #:	8413452	Issue Dt:	04/09/2013	Application #:	12950080	Filing Dt:	11/19/2010
Publication #:	US20110126554	Pub Dt:	06/02/2011
Title:	LINEAR DRIVE CRYOGENIC REFRIGERATOR

Patent #:	10156386	Issue Dt:	12/18/2018	Application #:	13106180	Filing Dt:	05/12/2011
Publication #:	US20120038120	Pub Dt:	02/16/2012
Title:	SYSTEM AND METHOD FOR CRYOGENIC COOLING

Patent #:	NONE	Issue Dt:		Application #:	13111149	Filing Dt:	05/19/2011
Publication #:	US20110265496	Pub Dt:	11/03/2011
Title:	PROCESS CHAMBER WITH INTEGRATED PUMPING

Patent #:	8869552	Issue Dt:	10/28/2014	Application #:	13605738	Filing Dt:	09/06/2012
Publication #:	US20130019620	Pub Dt:	01/24/2013
Title:	Helium Management Control System

Patent #:	9687753	Issue Dt:	06/27/2017	Application #:	13753093	Filing Dt:	01/29/2013
Publication #:	US20130205805	Pub Dt:	08/15/2013
Title:	MULTI-REFRIGERATOR HIGH SPEED CRYOPUMP

Patent #:	9266038	Issue Dt:	02/23/2016	Application #:	13983973	Filing Dt:	08/06/2013
Publication #:	US20130312431	Pub Dt:	11/28/2013
Title:	Cryopump

Patent #:	9266039	Issue Dt:	02/23/2016	Application #:	13988497	Filing Dt:	05/20/2013
Publication #:	US20130239593	Pub Dt:	09/19/2013
Title:	CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE

Patent #:	10113781	Issue Dt:	10/30/2018	Application #:	14001803	Filing Dt:	01/09/2014
Publication #:	US20140130527	Pub Dt:	05/15/2014
Title:	Helium Management Control System

Patent #:	10228167	Issue Dt:	03/12/2019	Application #:	14130263	Filing Dt:	12/30/2013
Publication #:	US20140144165	Pub Dt:	05/29/2014
Title:	SYSTEMS AND METHODS FOR WARMING A CRYOGENIC HEAT EXCHANGER ARRAY, FOR COMPACT AND EFFICIENT REFRIGERATION, AND FOR ADAPTIVE POWER MANAGEMENT

Patent #:	9334859	Issue Dt:	05/10/2016	Application #:	14523507	Filing Dt:	10/24/2014
Publication #:	US20150040596	Pub Dt:	02/12/2015
Title:	Helium Management Control System

Patent #:	9926919	Issue Dt:	03/27/2018	Application #:	15012399	Filing Dt:	02/01/2016
Publication #:	US20160146200	Pub Dt:	05/26/2016
Title:	Cryopump

Patent #:	10288052	Issue Dt:	05/14/2019	Application #:	15143125	Filing Dt:	04/29/2016
Publication #:	US20170002802	Pub Dt:	01/05/2017
Title:	HELIUM MANAGEMENT CONTROL SYSTEM

Patent #:	10495079	Issue Dt:	12/03/2019	Application #:	15270354	Filing Dt:	09/20/2016
Publication #:	US20170009756	Pub Dt:	01/12/2017
Title:	CRYOPUMP HYBRID FRONTAL ARRAY

Patent #:	10632399	Issue Dt:	04/28/2020	Application #:	15633100	Filing Dt:	06/26/2017
Publication #:	US20170306939	Pub Dt:	10/26/2017
Title:	MULTI-REFRIGERATOR HIGH SPEED CRYOPUMP

Patent #:	10900699	Issue Dt:	01/26/2021	Application #:	16173623	Filing Dt:	10/29/2018
Publication #:	US20190063807	Pub Dt:	02/28/2019
Title:	HELIUM MANAGEMENT CONTROL SYSTEM

Patent #:	11215384	Issue Dt:	01/04/2022	Application #:	16221954	Filing Dt:	12/17/2018
Publication #:	US20190120528	Pub Dt:	04/25/2019
Title:	System and Method for Cryogenic Cooling

Patent #:	11175075	Issue Dt:	11/16/2021	Application #:	16298106	Filing Dt:	03/11/2019
Publication #:	US20190203984	Pub Dt:	07/04/2019
Title:	Systems And Methods For Warming A Cryogenic Heat Exchanger Array, For Compact And Efficient Refrigeration, And For Adaptive Power Management

Assignor

BROOKS AUTOMATION, INC.

Exec Dt:

07/01/2019

Assignee

EDWARDS VACUUM LLC

6416 INDUCON DR. WEST

SANBORN, NEW YORK 14132-9019

Correspondence name and address
	BRIAN L. PETREQUIN
	GREENBERG TRAURIG, LLP
	500 CAMPUS DRIVE, SUITE 400
	FLORHAM PARK, NJ 07932-0677

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