Total properties:
47
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Patent #:
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Issue Dt:
|
09/17/2002
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Application #:
|
09736097
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Filing Dt:
|
12/13/2000
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Publication #:
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Pub Dt:
|
06/13/2002
| | | | |
Title:
|
ELECTRON BEAM ION SOURCE WITH INTEGRAL LOW-TEMPERATURE VAPORIZER
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Patent #:
|
|
Issue Dt:
|
09/19/2006
|
Application #:
|
10170512
|
Filing Dt:
|
06/12/2002
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Publication #:
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Pub Dt:
|
12/18/2003
| | | | |
Title:
|
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
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|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
10183768
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Filing Dt:
|
06/26/2002
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Publication #:
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Pub Dt:
|
01/01/2004
| | | | |
Title:
|
ELECTRON IMPACT ION SOURCE
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Patent #:
|
|
Issue Dt:
|
06/01/2004
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Application #:
|
10244617
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Filing Dt:
|
09/16/2002
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Publication #:
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Pub Dt:
|
05/08/2003
| | | | |
Title:
|
ELECTRON BEAM ION SOURCE WITH INTEGRAL LOW-TEMPERATURE VAPORIZER
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10251491
|
Filing Dt:
|
09/20/2002
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Publication #:
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Pub Dt:
|
01/01/2004
| | | | |
Title:
|
Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions
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|
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Patent #:
|
|
Issue Dt:
|
06/20/2006
|
Application #:
|
10433493
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Filing Dt:
|
01/08/2004
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Publication #:
|
|
Pub Dt:
|
06/03/2004
| | | | |
Title:
|
ION IMPLANTATION SYSTEM AND CONTROL METHOD
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|
|
Patent #:
|
|
Issue Dt:
|
06/14/2011
|
Application #:
|
10519699
|
Filing Dt:
|
09/14/2005
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Publication #:
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Pub Dt:
|
05/11/2006
| | | | |
Title:
|
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/25/2010
|
Application #:
|
10519700
|
Filing Dt:
|
09/14/2005
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Publication #:
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Pub Dt:
|
05/11/2006
| | | | |
Title:
|
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
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|
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Patent #:
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|
Issue Dt:
|
10/26/2010
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Application #:
|
10582392
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Filing Dt:
|
06/28/2007
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Publication #:
|
|
Pub Dt:
|
09/13/2007
| | | | |
Title:
|
METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION
|
|
|
Patent #:
|
|
Issue Dt:
|
05/25/2010
|
Application #:
|
10582524
|
Filing Dt:
|
04/05/2007
|
Publication #:
|
|
Pub Dt:
|
02/28/2008
| | | | |
Title:
|
CONTROLLING THE FLOW OF VAPORS SUBLIMATED FROM SOLIDS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/04/2006
|
Application #:
|
10748078
|
Filing Dt:
|
12/30/2003
|
Publication #:
|
|
Pub Dt:
|
10/07/2004
| | | | |
Title:
|
ELECTRON IMPACT ION SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
04/04/2006
|
Application #:
|
10825339
|
Filing Dt:
|
04/15/2004
|
Publication #:
|
|
Pub Dt:
|
09/30/2004
| | | | |
Title:
|
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
09/26/2006
|
Application #:
|
10887425
|
Filing Dt:
|
07/08/2004
|
Publication #:
|
|
Pub Dt:
|
12/09/2004
| | | | |
Title:
|
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
03/06/2007
|
Application #:
|
10887426
|
Filing Dt:
|
07/08/2004
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
Title:
|
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/2011
|
Application #:
|
11041558
|
Filing Dt:
|
01/21/2005
|
Publication #:
|
|
Pub Dt:
|
07/28/2005
| | | | |
Title:
|
ISOTOPICALLY-ENRICHED BORANES AND METHODS OF PREPARING THEM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/05/2010
|
Application #:
|
11047165
|
Filing Dt:
|
01/28/2005
|
Publication #:
|
|
Pub Dt:
|
08/04/2005
| | | | |
Title:
|
METHODS OF SYNTHESIS OF ISOTOPICALLY ENRICHED BOROHYDRIDE AND METHODS OF SYNTHESIS OF ISOTOPICALLY ENRICHED BORANES
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Patent #:
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|
Issue Dt:
|
04/28/2009
|
Application #:
|
11050159
|
Filing Dt:
|
02/02/2005
|
Publication #:
|
|
Pub Dt:
|
08/04/2005
| | | | |
Title:
|
METHOD OF PRODUCTION OF B10H102-AMMONIUM SALTS AND METHODS OF PRODUCTION OF B18H22
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|
|
Patent #:
|
|
Issue Dt:
|
01/20/2009
|
Application #:
|
11174107
|
Filing Dt:
|
07/01/2005
|
Publication #:
|
|
Pub Dt:
|
12/08/2005
| | | | |
Title:
|
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/2010
|
Application #:
|
11268005
|
Filing Dt:
|
11/07/2005
|
Publication #:
|
|
Pub Dt:
|
05/11/2006
| | | | |
Title:
|
DUAL MODE ION SOURCE FOR ION IMPLANTATION
|
|
|
Patent #:
|
|
Issue Dt:
|
10/27/2009
|
Application #:
|
11365719
|
Filing Dt:
|
03/01/2006
|
Publication #:
|
|
Pub Dt:
|
10/26/2006
| | | | |
Title:
|
ION IMPLANTATION SYSTEM AND CONTROL METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
09/07/2010
|
Application #:
|
11452003
|
Filing Dt:
|
06/12/2006
|
Publication #:
|
|
Pub Dt:
|
12/07/2006
| | | | |
Title:
|
METHOD AND APPARATUS FOR EXTRACTING IONS FROM AN ION SOURCE FOR USE IN ION IMPLANTATION
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11502695
|
Filing Dt:
|
08/11/2006
|
Publication #:
|
|
Pub Dt:
|
12/07/2006
| | | | |
Title:
|
Method and apparatus for extracting ions from an ion source for use in ion implantation
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/2010
|
Application #:
|
11527994
|
Filing Dt:
|
09/26/2006
|
Publication #:
|
|
Pub Dt:
|
05/17/2007
| | | | |
Title:
|
DUAL MODE ION SOURCE FOR ION IMPLANTATION
|
|
|
Patent #:
|
|
Issue Dt:
|
02/23/2010
|
Application #:
|
11634565
|
Filing Dt:
|
12/06/2006
|
Publication #:
|
|
Pub Dt:
|
06/28/2007
| | | | |
Title:
|
SYSTEM AND METHOD FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES BY THE IMPLANTATION OF CARBON CLUSTERS
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|
Patent #:
|
|
Issue Dt:
|
12/08/2009
|
Application #:
|
11647714
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
05/29/2008
| | | | |
Title:
|
METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11647719
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
05/17/2007
| | | | |
Title:
|
Method and apparatus for extracting ions from an ion source for use in ion implantation
|
|
|
Patent #:
|
|
Issue Dt:
|
07/01/2008
|
Application #:
|
11647801
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
08/02/2007
| | | | |
Title:
|
ION IMPLANTATION SYSTEM AND CONTROL METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
02/17/2009
|
Application #:
|
11647867
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
08/23/2007
| | | | |
Title:
|
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11647898
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
10/18/2007
| | | | |
Title:
|
Method and apparatus for extending equipment uptime in ion implantation
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2011
|
Application #:
|
11647922
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
05/10/2007
| | | | |
Title:
|
METHOD OF MANUFACTURING CMOS DEVICES BY THE IMPLANTATION OF N- AND P-TYPE CLUSTER IONS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2010
|
Application #:
|
11647924
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
11/15/2007
| | | | |
Title:
|
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11647928
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
08/21/2008
| | | | |
Title:
|
Semiconductor device and method of fabricating a semiconductor device
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|
|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
11648091
|
Filing Dt:
|
12/29/2006
|
Publication #:
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|
Pub Dt:
|
08/09/2007
| | | | |
Title:
|
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
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|
|
Patent #:
|
|
Issue Dt:
|
02/05/2013
|
Application #:
|
11648269
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
05/06/2010
| | | | |
Title:
|
METHOD AND APPARATUS FOR EXTRACTING IONS FROM AN ION SOURCE FOR USE IN ION IMPLANTATION
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|
|
Patent #:
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|
Issue Dt:
|
05/05/2009
|
Application #:
|
11648282
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
08/02/2007
| | | | |
Title:
|
ION IMPLANTATION SYSTEM AND CONTROL METHOD
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11648365
|
Filing Dt:
|
12/29/2006
|
Publication #:
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|
Pub Dt:
|
03/27/2008
| | | | |
Title:
|
Controlling the flow of vapors sublimated from solids
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11648366
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
02/21/2008
| | | | |
Title:
|
Dual mode ion source for ion implantation
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11648378
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
07/26/2007
| | | | |
Title:
|
Dual mode ion source for ion implantation
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11648506
|
Filing Dt:
|
12/29/2006
|
Publication #:
|
|
Pub Dt:
|
05/17/2007
| | | | |
Title:
|
Ion implantation ion source, system and method
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11759768
|
Filing Dt:
|
06/07/2007
|
Publication #:
|
|
Pub Dt:
|
12/11/2008
| | | | |
Title:
|
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF IONS DERIVED FROM CARBORANE MOLECULAR SPECIES
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11778272
|
Filing Dt:
|
07/16/2007
|
Publication #:
|
|
Pub Dt:
|
12/06/2007
| | | | |
Title:
|
ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
11/19/2013
|
Application #:
|
11934873
|
Filing Dt:
|
11/05/2007
|
Publication #:
|
|
Pub Dt:
|
05/29/2008
| | | | |
Title:
|
ION IMPLANTATION WITH MOLECULAR IONS CONTAINING PHOSPHORUS AND ARSENIC
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/2010
|
Application #:
|
11940136
|
Filing Dt:
|
11/14/2007
|
Publication #:
|
|
Pub Dt:
|
04/17/2008
| | | | |
Title:
|
DUAL MODE ION SOURCE FOR ION IMPLANTATION
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/2010
|
Application #:
|
12059608
|
Filing Dt:
|
03/31/2008
|
Publication #:
|
|
Pub Dt:
|
01/15/2009
| | | | |
Title:
|
EXTERNAL CATHODE ION SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
04/05/2011
|
Application #:
|
12100840
|
Filing Dt:
|
04/10/2008
|
Publication #:
|
|
Pub Dt:
|
12/04/2008
| | | | |
Title:
|
CLUSTER ION IMPLANTATION FOR DEFECT ENGINEERING
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12105702
|
Filing Dt:
|
04/18/2008
|
Publication #:
|
|
Pub Dt:
|
09/18/2008
| | | | |
Title:
|
METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION
|
|
|
Patent #:
|
|
Issue Dt:
|
04/19/2011
|
Application #:
|
12125176
|
Filing Dt:
|
05/22/2008
|
Publication #:
|
|
Pub Dt:
|
11/27/2008
| | | | |
Title:
|
METHOD AND SYSTEM FOR EXTRACTING ION BEAMS COMPOSED OF MOLECULAR IONS (CLUSTER ION BEAM EXTRACTION SYSTEM)
|
|