Patent Assignment Details
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Reel/Frame: | 013805/0023 | |
| Pages: | 4 |
| | Recorded: | 02/21/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10371068
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Filing Dt:
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02/21/2003
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Title:
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OPTICAL CLOSED-LOOP CONTROL SYSTEM FOR A CMP APPARATUS AND METHOD OF MANUFACTURE THEREOF
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Assignee
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2901 EISENHOWER STREET |
CARROLLTON, TEXAS 75007 |
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Correspondence name and address
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HITT GAINES & BOISBRUN, P.C.
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MARK E. KELLEY
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P.O. BOX 832570
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RICHARDSON, TX 75083
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