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Patent Assignment Details
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Reel/Frame:009034/0026   Pages: 9
Recorded: 03/16/1998
Conveyance: RECORD TO CORRECT CONVEYING PARTY NAMES PREVIOUSLY RECORDED
Total properties: 1
1
Patent #:
Issue Dt:
07/13/1999
Application #:
08923453
Filing Dt:
09/04/1997
Title:
HETERODYNE SCATTEROMETER FOR DETECTING AND ANALYZING WAFER SURFACE DEFECTS
Assignors
1
Exec Dt:
05/30/1997
2
Exec Dt:
05/30/1997
3
Exec Dt:
05/30/1997
4
Exec Dt:
05/30/1997
Assignee
1
2000 OAKLEY PARK ROAD, SUITE 205
WALLED LAKE, MICHIGAN 48390
Correspondence name and address
DYKEMA GOSSETT PLLC
KEVIN G. MIERZWA
1577 N. WOODWARD, SUITE 300
BLOOMFIELD HILLS, MICHIGAN 48304

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