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Patent #:
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Issue Dt:
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06/18/1996
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Application #:
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08291575
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Filing Dt:
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08/16/1994
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Title:
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METHOD FOR FILING SUBSTRATE RECESSES USING ELEVATED TEMPERATURE AND PRESSURE
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08530195
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Filing Dt:
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10/02/1995
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Title:
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FORMING A LAYER
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Patent #:
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Issue Dt:
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11/19/1996
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Application #:
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08591026
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Filing Dt:
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01/25/1996
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Title:
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PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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11/04/1997
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Application #:
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08605697
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Filing Dt:
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02/22/1996
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Title:
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INDUCTIVELY COUPLED PLASMA REACTOR AND PROCESS
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Patent #:
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Issue Dt:
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11/04/1997
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Application #:
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08621772
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Filing Dt:
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03/22/1996
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Title:
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SINGLE BODY INJECTOR AND METHOD FOR DELIVERING GASES TO A SURFACE
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Patent #:
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Issue Dt:
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05/26/1998
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Application #:
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08637599
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Filing Dt:
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04/25/1996
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Title:
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TEMPERATURE SENSING METHODS AND APPARATUS
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Patent #:
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Issue Dt:
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07/28/1998
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Application #:
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08704227
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Filing Dt:
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08/27/1996
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Title:
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METHOD OF STRESS-RELIEVING SILICON OXIDE FILMS
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Patent #:
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Issue Dt:
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02/04/2003
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Application #:
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08727303
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Filing Dt:
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10/08/1996
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Title:
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METHOD OF PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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08831600
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Filing Dt:
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04/10/1997
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Title:
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METHOD FOR FILLING SUBSTRATE RECESSES USING PRESSURE, AND HEAT TREATMENT
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Patent #:
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Issue Dt:
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08/17/1999
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Application #:
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08838882
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Filing Dt:
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04/14/1997
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Title:
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EXHAUST VENT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION SYSTEMS
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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08869085
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Filing Dt:
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06/04/1997
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Title:
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METHOD OF MANUFACTURING AN INJECTOR FOR CHEMICAL VAPOR DEPOSITION PROCESSING
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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08892469
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Filing Dt:
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07/14/1997
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Title:
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SINGLE BODY INJECTOR AND METHOD FOR DELIVERING GASES TO A SURFACE
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Patent #:
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Issue Dt:
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07/19/2005
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Application #:
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08903077
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Filing Dt:
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07/30/1997
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Title:
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CONTROLLED ETCHING OF OXIDES VIA GAS PHASE REACTIONS
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Patent #:
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Issue Dt:
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04/18/2000
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Application #:
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08904953
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Filing Dt:
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08/01/1997
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Title:
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METHOD OF SURFACE TREATMENT OF SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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08904954
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Filing Dt:
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08/01/1997
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Title:
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METHOD OF SURFACE TREATMENT OF SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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08/29/2000
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Application #:
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08918852
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Filing Dt:
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08/26/1997
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Title:
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METHOD AND STRUCTURE FOR CONTROLLING PLASMA
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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08938995
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Filing Dt:
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09/26/1997
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Title:
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PLASMA PROCESSING APPARATUS WITH COILS IN DIELECTRIC WINDOWS
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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08975449
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Filing Dt:
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11/21/1997
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Title:
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METHOD OF REMOVING SURFACE OXIDES FOUND ON A TITANIUM OXYNITRIDE LAYER USING A NITROGEN CONTAINING PLASMA
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Patent #:
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Issue Dt:
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01/16/2001
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Application #:
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08975705
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Filing Dt:
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11/21/1997
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Title:
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METHODS OF FORMING A BARRIER LAYER
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Patent #:
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Issue Dt:
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08/31/1999
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Application #:
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08976928
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Filing Dt:
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11/24/1997
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Title:
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PROTECTIVE GAS SHIELD FOR CHEMICAL VAPOR DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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12/15/1998
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Application #:
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09008024
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Filing Dt:
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01/16/1998
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Title:
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FREE FLOATING SHIELD
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09009369
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Filing Dt:
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01/20/1998
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Title:
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METHOD FOR USING A HARD MASK FOR CRITICAL DIMENSION GROWTH CONTAINMENT
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Patent #:
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Issue Dt:
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02/22/2000
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Application #:
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09018021
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Filing Dt:
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02/02/1998
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Title:
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WAFER CARRIER AND SEMICONDUCTOR APPARATUS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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09055185
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Filing Dt:
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04/06/1998
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Title:
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APPARATUS FOR APPLYING PRESSURE TO A COATED SURFACE OF A WORKPIECE
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09065622
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Filing Dt:
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04/24/1998
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Title:
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METHOD AND APPARATUS FOR ETCHING A WORKPIECE
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Patent #:
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Issue Dt:
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03/04/2003
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Application #:
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09106178
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Filing Dt:
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06/29/1998
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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IMPROVED METAL OXIDE SEMICONDUCTOR DEVICE HAVING CONTOURED CHANNEL REGION AND ELEVATED SOURCE AND DRAIN REGIONS
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Patent #:
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Issue Dt:
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03/13/2001
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Application #:
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09113823
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Filing Dt:
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07/10/1998
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Title:
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SINGLE BODY INJECTOR AND DEPOSITION CHAMBER
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09142542
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Filing Dt:
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09/10/1998
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09150669
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Filing Dt:
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09/10/1998
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Title:
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ELECTROSTATIC CHUCKS
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09152673
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Filing Dt:
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09/14/1998
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Title:
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PLATEN FOR SEMICONDUCTOR WORKPIECES
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09185180
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Filing Dt:
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11/03/1998
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Title:
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FREE FLOATING SHIELD AND SEMICONDUCTOR PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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09204020
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Filing Dt:
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12/01/1998
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Title:
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PLASMA REACTOR WITH A DEPOSITION SHIELD
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09245861
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Filing Dt:
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02/08/1999
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Title:
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A METHOD AND APPARATUS FOR ETCHING A SUBSTRATE
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09339401
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Filing Dt:
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06/23/1999
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Title:
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FOIL FOR USE IN FILING SUBSTRATE RECESSES
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09382050
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Filing Dt:
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08/24/1999
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Title:
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PLASMA REACTOR WITH A DEPOSITION SHIELD
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09414717
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Filing Dt:
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10/12/1999
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Title:
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APPARATUS AND METHODS FOR SPUTTERING
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09423979
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Filing Dt:
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11/17/1999
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Title:
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METHOD AND APPARATUS FOR MANUFACTURING A MICROMECHANICAL DEVICE
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Patent #:
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Issue Dt:
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01/16/2001
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Application #:
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09434092
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Filing Dt:
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11/05/1999
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Title:
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PLASMA REACTOR WITH A DEPOSITION SHIELD
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Patent #:
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Issue Dt:
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01/09/2001
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Application #:
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09434990
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Filing Dt:
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11/05/1999
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Title:
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PLASMA REACTOR WITH A DEPOSITION SHIELD
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09446432
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Filing Dt:
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01/02/2001
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Title:
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APPARATUS FOR PROCESSING WORKPIECES
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Issue Dt:
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05/29/2001
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Application #:
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09462147
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03/08/2000
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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07/23/2002
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Application #:
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09462465
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Filing Dt:
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03/17/2000
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Title:
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METHOD OF FILLING A RECESS
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09477819
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01/05/2000
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01/03/2002
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Title:
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SPUTTERING APPARATUS
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03/27/2001
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Application #:
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09480730
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01/06/2000
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Title:
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CHEMICAL VAPOR DEPOSITION SYSTEM AND METHOD
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Issue Dt:
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03/05/2002
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Application #:
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09492420
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01/27/2000
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Title:
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Free floating shield and semiconductor processing system
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Issue Dt:
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11/07/2000
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Application #:
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09493492
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Filing Dt:
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01/28/2000
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Title:
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Wafer processing reactor having a gas flow control system and method
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Patent #:
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Issue Dt:
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10/22/2002
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09518141
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03/03/2000
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Title:
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GAS DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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09548014
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Filing Dt:
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04/12/2000
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Pub Dt:
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09/19/2002
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Title:
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METHOD AND DEPOSITING A LAYER
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09568987
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05/11/2000
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Title:
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DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09574826
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Filing Dt:
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05/19/2000
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Title:
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PROTECTIVE GAS SHIELD APPARATUS
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Issue Dt:
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05/20/2003
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Application #:
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09628201
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07/28/2000
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Title:
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THERMAL ISOLATION USING VERTICAL STRUCTURES
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09634988
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Filing Dt:
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08/08/2000
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Title:
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PLASMA VACUUM SUBSTRATE TREATMENT PROCESS AND SYSTEM
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Patent #:
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Issue Dt:
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12/17/2002
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Application #:
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09673081
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Filing Dt:
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03/29/2001
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Title:
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INDUCTIVE COIL ASSEMBLY HAVING MULTIPLE COIL SEGMENTS FOR PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/05/2003
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Application #:
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09674658
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Filing Dt:
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12/18/2000
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Title:
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GAS DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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08/09/2005
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Application #:
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09674659
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01/08/2001
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Title:
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GAS GENERATION SYSTEM
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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09674660
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Filing Dt:
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11/03/2000
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Title:
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CHLOROTRIFUORINE GAS GENERATOR SYSTEM
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Issue Dt:
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12/11/2007
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09674925
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11/08/2000
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Title:
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METHOD AND APPARATUS FOR STABLIZING A PLASMA
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Issue Dt:
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11/25/2003
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09682894
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Filing Dt:
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10/30/2001
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Publication #:
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Pub Dt:
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07/04/2002
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Title:
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THERMAL ISOLATION USING VERTICAL STRUCTURES
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Patent #:
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Issue Dt:
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10/25/2005
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Application #:
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09692007
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Filing Dt:
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10/19/2000
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Title:
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METHOD FOR USING A HARD MASK FOR CRITICAL DIMENSION GROWTH CONTAINMENT
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09704714
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11/03/2000
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Title:
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METHOD OF FORMING A BARRIER LAYER
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Issue Dt:
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09/30/2003
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09719500
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03/29/2001
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Title:
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METHOD AND APPARATUS FOR DECHUCKING A SUBSTRATE FROM AN ELECTROSTATIC CHUCK
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Issue Dt:
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11/28/2006
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09744212
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03/07/2001
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Title:
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METHOD AND APPARATUS FOR ANISOTROPIC ETCHING
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02/18/2003
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09757542
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01/09/2001
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Publication #:
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06/28/2001
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Title:
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SINGLE BODY INJECTOR AND DEPOSITION CHAMBER
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Patent #:
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Issue Dt:
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03/11/2003
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09834880
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04/16/2001
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10/25/2001
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Title:
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METHOD OF COOLING AN INDUCTION COIL
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05/03/2005
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09839763
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04/20/2001
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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APPARATUS FOR ETCHING SEMICONDUCTOR SAMPLES AND A SOURCE FOR PROVIDING A GAS BY SUBLIMATION THERETO
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Issue Dt:
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02/18/2003
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09881425
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Filing Dt:
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06/14/2001
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Publication #:
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Pub Dt:
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10/18/2001
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Title:
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DEPOSITION SHIELD FOR A PLASMA REACTOR
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09884460
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Filing Dt:
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06/20/2001
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Publication #:
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Pub Dt:
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05/23/2002
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/05/2003
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Application #:
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09895169
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07/02/2001
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Publication #:
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Pub Dt:
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02/28/2002
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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09901615
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Filing Dt:
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07/11/2001
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Publication #:
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Pub Dt:
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11/22/2001
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Title:
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HIGH PRESSURE SEAL
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Patent #:
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01/25/2005
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Application #:
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09996869
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11/27/2001
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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SEMICONDUCTOR WAFER PROCESSING SYSTEM WITH VERTICALLY-STACKED PROCESS CHAMBERS AND SINGLE-AXIS DUAL-WAFER TRANSFER SYSTEM
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08/23/2005
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Application #:
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10018809
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Filing Dt:
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03/25/2002
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Title:
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PLASMA ETCHING
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Patent #:
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Issue Dt:
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10/04/2005
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Application #:
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10045318
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Filing Dt:
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11/09/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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METHOD FOR USING A HARD MASK FOR CRITICAL DIMENSION GROWTH CONTAINMENT
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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10106823
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Filing Dt:
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03/27/2002
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Publication #:
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Pub Dt:
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10/03/2002
| | | | |
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Title:
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METHOD OF ETCHING A SUBSTRATE
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10182869
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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01/02/2003
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Title:
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ELECTROSTATIC CLAMPING
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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10194639
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Filing Dt:
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07/12/2002
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Publication #:
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Pub Dt:
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02/27/2003
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Title:
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MODULAR INJECTOR AND EXHAUST ASSEMBLY
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Patent #:
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Issue Dt:
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07/13/2004
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Application #:
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10226773
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Filing Dt:
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08/23/2002
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Publication #:
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Pub Dt:
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05/22/2003
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Title:
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ATMOSPHERIC PRESSURE WAFER PROCESSING REACTOR HAVING AN INTERNAL PRESSURE CONTROL SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10242762
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Filing Dt:
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09/13/2002
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Publication #:
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Pub Dt:
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06/26/2003
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Title:
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METHODS OF FORMING NITRIDE FILMS
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Patent #:
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Issue Dt:
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05/27/2008
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Application #:
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10275439
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Filing Dt:
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11/06/2002
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Publication #:
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Pub Dt:
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05/27/2004
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Title:
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MAGNETRON SPUTTERING
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Patent #:
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Issue Dt:
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08/23/2005
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Application #:
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10290283
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Filing Dt:
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11/08/2002
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Publication #:
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Pub Dt:
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05/15/2003
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Title:
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METHOD OF FORMING A PATTERNED METAL LAYER
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10336923
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Filing Dt:
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01/06/2003
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Publication #:
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Pub Dt:
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05/22/2003
| | | | |
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Title:
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METHOD OF DEPOSITING DIELECTRIC
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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10364343
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Filing Dt:
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02/12/2003
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Publication #:
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Pub Dt:
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08/14/2003
| | | | |
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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10367850
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Filing Dt:
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02/19/2003
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Publication #:
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Pub Dt:
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08/28/2003
| | | | |
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Title:
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BARRIER LAYER AND METHOD OF DEPOSITING A BARRIER LAYER
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10419113
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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10/30/2003
| | | | |
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10434190
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Filing Dt:
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05/09/2003
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Publication #:
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Pub Dt:
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11/13/2003
| | | | |
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Title:
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SHUTTER
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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10464468
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Filing Dt:
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06/19/2003
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Publication #:
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Pub Dt:
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01/08/2004
| | | | |
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Title:
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DEPOSITION METHODS AND APPARATUS
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Patent #:
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Issue Dt:
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10/09/2007
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Application #:
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10471785
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Filing Dt:
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09/16/2003
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Publication #:
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Pub Dt:
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08/05/2004
| | | | |
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Title:
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METHODS AND APPARATUS FOR FORMING PRECURSORS
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Patent #:
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Issue Dt:
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10/31/2006
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Application #:
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10483805
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Filing Dt:
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09/15/2004
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Publication #:
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Pub Dt:
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03/03/2005
| | | | |
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Title:
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DEPOSITING A TANTALUM FILM
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10637654
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Filing Dt:
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08/11/2003
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Publication #:
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Pub Dt:
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04/01/2004
| | | | |
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Title:
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METHOD OF FORMING AN ACOUSTIC RESONATOR
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Patent #:
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Issue Dt:
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06/14/2005
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Application #:
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10654404
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Filing Dt:
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09/04/2003
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Publication #:
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Pub Dt:
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03/25/2004
| | | | |
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Title:
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METHOD OF DEPOSITING A LAYER
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|
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Patent #:
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Issue Dt:
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10/12/2004
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Application #:
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10685062
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Filing Dt:
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10/14/2003
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Publication #:
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Pub Dt:
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08/12/2004
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Title:
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HEATING SYSTEM, METHOD FOR HEATING A DEPOSITION OR OXIDATION REACTOR, AND REACTOR INCLUDING THE HEATING SYSTEM
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Patent #:
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Issue Dt:
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06/05/2007
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Application #:
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10817888
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Filing Dt:
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04/06/2004
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Publication #:
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Pub Dt:
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10/14/2004
| | | | |
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Title:
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METHODS OF DEPOSITING PIEZOELECTRIC FILMS
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Patent #:
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Issue Dt:
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07/26/2005
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Application #:
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10854869
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Filing Dt:
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05/26/2004
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Title:
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GAS DISTRIBUTION SYSTEM
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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10902582
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Filing Dt:
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07/30/2004
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Publication #:
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Pub Dt:
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02/03/2005
| | | | |
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Title:
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METHOD AND APPARATUS FOR NON-AGGRESSIVE PLASMA-ENHANCED VAPOR DEPOSITION OF DIELECTRIC FILMS
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|
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Patent #:
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Issue Dt:
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04/01/2008
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Application #:
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10923027
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Filing Dt:
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08/23/2004
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Publication #:
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Pub Dt:
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02/24/2005
| | | | |
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Title:
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METHOD OF FORMING A SUBSTANTIALLY CLOSED VOID
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|
|
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Patent #:
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Issue Dt:
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04/10/2007
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Application #:
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10946310
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Filing Dt:
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09/22/2004
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Publication #:
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Pub Dt:
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02/24/2005
| | | | |
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Title:
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METHOD OF FORMING A DIFFUSION BARRIER
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|
|
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Patent #:
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Issue Dt:
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08/10/2010
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Application #:
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10991554
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Filing Dt:
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11/18/2004
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Publication #:
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Pub Dt:
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05/18/2006
| | | | |
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Title:
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SYSTEMS AND METHODS FOR ACHIEVING ISOTHERMAL BATCH PROCESSING OF SUBSTRATES USED FOR THE PRODUCTION OF MICRO-ELECTRO-MECHANICAL-SYSTEMS
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|
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Patent #:
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Issue Dt:
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11/28/2006
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Application #:
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10997864
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Filing Dt:
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11/29/2004
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Publication #:
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Pub Dt:
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05/12/2005
| | | | |
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Title:
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ACOUSTIC RESONATORS
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|
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Patent #:
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Issue Dt:
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07/22/2008
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Application #:
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11006634
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Filing Dt:
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12/08/2004
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Publication #:
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Pub Dt:
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06/23/2005
| | | | |
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Title:
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MAGNET ASSEMBLIES
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|
|
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Patent #:
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Issue Dt:
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02/17/2009
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Application #:
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11080964
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Filing Dt:
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03/16/2005
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Publication #:
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Pub Dt:
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07/21/2005
| | | | |
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Title:
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PLASMA PROCESSING APPARATUS
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|
|
|
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Patent #:
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Issue Dt:
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05/22/2007
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Application #:
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11088193
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Filing Dt:
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03/24/2005
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Publication #:
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Pub Dt:
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09/29/2005
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Title:
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RF STAND OFFS
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