Total properties:
16
|
|
Patent #:
|
|
Issue Dt:
|
09/07/1993
|
Application #:
|
07672665
|
Filing Dt:
|
03/19/1991
|
Title:
|
MANUFACTURE OF HIGH PRECISION ELECTRONIC COMPONENTS WITH ULTRA-HIGH PURITY LIQUIDS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/05/1996
|
Application #:
|
08179001
|
Filing Dt:
|
01/07/1994
|
Title:
|
POINT-OF-USE AMMONIA PURIFICATION FOR ELECTRONIC COMPONENT MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/07/1999
|
Application #:
|
08524691
|
Filing Dt:
|
09/07/1995
|
Title:
|
MANUFACTURE OF HIGH PRECISION ELECTRONIC COMPONENTS WITH ULTRA-HIGH PURITY LIQUIDS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/26/1998
|
Application #:
|
08610261
|
Filing Dt:
|
03/04/1996
|
Title:
|
POINT-OF-USE AMMONIA PURIFICATION FOR ELECTRONIC COMPONENT MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
01/12/1999
|
Application #:
|
08649517
|
Filing Dt:
|
05/17/1996
|
Title:
|
THIN FILM TRANSISTOR-LIQUID CRYSTAL DISPLAY AND A MANUFACTURING METHOD THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
12/08/1998
|
Application #:
|
08673579
|
Filing Dt:
|
07/01/1996
|
Title:
|
ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROCHLORIC ACID FOR SEMICONDUCTOR PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
12/08/1998
|
Application #:
|
08674110
|
Filing Dt:
|
07/01/1996
|
Title:
|
ON-SITE AMMONIA PURIFICATION FOR SEMICONDUCTOR MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/03/1998
|
Application #:
|
08674130
|
Filing Dt:
|
07/01/1996
|
Title:
|
ON-SITE GENERATION OF ULTRA-HIGH-PURITY BUFFERED-HF FOR SEMICONDUCTOR PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
04/10/2001
|
Application #:
|
08759213
|
Filing Dt:
|
12/05/1996
|
Title:
|
ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY NITRIC ACID
|
|
|
Patent #:
|
|
Issue Dt:
|
02/26/2002
|
Application #:
|
08881747
|
Filing Dt:
|
06/24/1997
|
Publication #:
|
|
Pub Dt:
|
12/13/2001
| | | | |
Title:
|
ON-SITE GENERATION OF ULTRA-HIGH-PURITY BUFFERED-HF AND AMMONIUM FLUORIDE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/16/2000
|
Application #:
|
09034004
|
Filing Dt:
|
03/03/1998
|
Title:
|
ON-SITE MANUFACTURE OF ULTRA-HIGH-PURITY HYDROFLUORIC ACID FOR SEMICONDUCTOR PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
12/14/1999
|
Application #:
|
09037522
|
Filing Dt:
|
03/10/1998
|
Title:
|
ON-SITE AMMONIA PURIFICATION FOR SEMICONDUCTOR MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
04/18/2000
|
Application #:
|
09051304
|
Filing Dt:
|
04/16/1998
|
Title:
|
SYSTEM AND METHOD FOR ON-SITE MIXING OF ULTRA-HIGH-PURITY CHEMICALS FOR SEMICONDUCTOR PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2000
|
Application #:
|
09083184
|
Filing Dt:
|
05/22/1998
|
Title:
|
POINT-OF-USE AMMONIA PURIFICATION FOR ELECTRONIC COMPONENT MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/05/2001
|
Application #:
|
09137418
|
Filing Dt:
|
08/20/1998
|
Title:
|
PLASMA CLEANING AND ETCHING METHODS USING NON-GLOBAL-WARMING COMPOUNDS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2001
|
Application #:
|
09168607
|
Filing Dt:
|
10/09/1998
|
Title:
|
VARIABLE HEIGHT SENSOR TREE
|
|