Patent Assignment Details
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Reel/Frame: | 012892/0027 | |
| Pages: | 3 |
| | Recorded: | 05/08/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10141994
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Filing Dt:
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05/08/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Title:
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Method for decreasing wafer scrap rate for a chemical treatment apparatus
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Assignee
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 16, CREATION RD. 1 |
HSINCHU, TAIAN, TAIWAN R.O.C |
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Correspondence name and address
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BAKER BOTTS L.L.P.
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JAMES J. MAUNE
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30 ROCKEFELLER PLAZA-44 FL.
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NEW YORK, NY 10112
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